Inexpensive and fast wafer-scale fabrication of nanohole arrays in thin gold films for plasmonics

Nanotechnology

Volumn 21, Issue 20, 2010, Pages

  Klein, Mona J K ^a,b   Guillaumée, Mickal ^a   Wenger, Bernard ^a   Andrea Dunbar, L ^a   Brugger, Jürgen ^b   Heinzelmann, Harry ^a   Pugin, Raphal ^a  

^a CSEM   (Switzerland)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION LAYER; BATCH FABRICATION; GOLD FILM; HOLE ARRAYS; HOLE SIZE; LATTICE PERIODS; NANO SCALE; NANO SPHERE LITHOGRAPHY; NANOHOLE ARRAYS; PLASMONICS; POLYSTYRENE BEADS; REFRACTIVE INDEX SENSING; SPUTTER-ETCHING; THIN GOLD FILM; WAFER SCALE FABRICATION; WAFER-SCALE;

FABRICATION; METALLIC FILMS; PLASMONS; POLYSTYRENES; REFRACTIVE INDEX;

GOLD;

EID: 77951545823     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/20/205301     Document Type: Article

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