Laser-induced surface patterning by means of microspheres

Applied Physics Letters

Volumn 80, Issue 25, 2002, Pages 4693-4695

  Piglmayer, K ^a   Denk, R ^a   Bauerle D ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

LASER INDUCED; MICRO-LENS ARRAYS; REGULAR LATTICE; SURFACE PATTERNING;

POLYIMIDES; QUARTZ; SILICON COMPOUNDS;

MICROSPHERES;

EID: 79955993759     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1489085     Document Type: Article

References (20)

1. D. Bäuerle, Laser Processing and Chemistry, 3rd ed. (Springer, Berlin, 2000).
2. M. K. Herndorn, R. T. Collins, R. E. Hollingsworth, P. R. Larson, and M. B. Johnson, Appl. Phys. Lett. 74, 141 (1999). apl APPLAB 0003-6951
3. S. Nolte, B. N. Chichkov, H. Welling, Y. Shani, K. Lieberman, and H. Terkel, Opt. Lett. 24, 914 (1999). opl OPLEDP 0146-9592
4. G. Wysocki, S. T. Dai, T. Brandstetter, J. Heitz, and D. Bäuerle, Appl. Phys. Lett. 79, 159 (2001). apl APPLAB 0003-6951
5. J. D. Pedarnig, S. T. Dai, T. Brandstetter, J. Heitz, and D. Bäuerle, Appl. Phys. A: Mater. Sci. Process. 67, 403 (1998). mfc APAMFC 0947-8396
6. U. Brauch, T. Hoffmann, and R. Springer, Laser Optoelektron. 4, 59 (2000).
7. F. Burmeister, W. Badowsky, T. Braun, S. Wieprich, J. Boneberg, and P. Leiderer, Appl. Surf. Sci. 144,145, 461 (1999). asu ASUSEE 0169-4332
8. J. C. Hulteen and R. P. Van Duyne, J. Vac. Sci. Technol. A 13, 1553 (1995). jva JVTAD6 0734-2101
9. T. Fourrier, G. Schrems, T. Mühlberger, J. Heitz, N. Arnold, D. Bäuerle, M. Mosbacher, J. Boneberg, and P. Leiderer, Appl. Phys. A: Mater. Sci. Process. 72, 1 (2001). mfc APAMFC 0947-8396
10. K. Piglmayer, E. Arenholz, C. Ortwein, N. Arnold, and D. Bäuerle, Appl. Phys. Lett. 73, 847 (1998). apl APPLAB 0003-6951
11. R. Micheletto, H. Fukuda, and M. Ohtsu, Langmuir 11, 3333 (1995). lan LANGD5 0743-7463
12. V. M. Masalov, K. A. Aldushin, P. V. Dolganov, and G. A. Emel'chenko, Phys. Low-Dimens. Semicond. Struct. 5/6, 45 (2001). pld 59EEAO
13. X. Chen and S. R. J. Brueck, J. Vac. Sci. Technol. B 16, 3392 (1998). jvb JVTBD9 0734-211X
14. D. Bäuerle, K. Piglmayer, R. Denk, and N. Arnold, Lambda Phys. Highlights (to be published).
15. Yu. A. Kravtsov and Yu. I. Orlov, Geometrical Optics of Inhomogeneous Media (Springer, New York, 1990).
16. R. Denk, K. Piglmayer, and D. Bäuerle, Appl. Phys. A: Mater. Sci. Process. 74, 825 (2002). mfc APAMFC 0947-8396
17. R. Denk, K. Piglmayer, and D. Büauerle, Appl. Phys. A: Mater. Sci. Process. (to be published).
18. H.-J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, J. Microsc. 202, 129 (2001). jmi JMICAR 0022-2720
19. H.-J. Münzer, M. Mosbacher, M. Bertsch, O. Dubbers, A. Pack, R. Wannemacher, B.-U. Runge, D. Bäuerle, and P. Leiderer, Proc SPIE (to be published).
20. B. S. Luk'yanchuk, Y. W. Zheng, and Y. F. Lu, Proc. SPIE 4065, 576 (2000). spi PSISDG 0277-786X