Six-axis nano-positioning with planar magnetic levitation

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2001-January, Issue , 2001, Pages 174-179

  Kim, Won Jong ^a  

^a Texas AandM University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); MAGNETIC LEVITATION VEHICLES; NANOMAGNETICS; NANOTECHNOLOGY;

MAGLEV TECHNOLOGY; MAGNETIC LEVITATION (MAGLEV); NANOSCALE SCIENCE AND ENGINEERING; NANOSCALE STRUCTURE; PRECISION APPLICATIONS; RESEARCH ACTIVITIES; SIX DEGREES OF FREEDOM; VIBRATION ISOLATIONS;

MAGNETIC LEVITATION;

EID: 84902388680     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2001.966414     Document Type: Conference Paper

References (25)

1. M. C. Roco, "A Frontier for Engineering", Mechanical Engineering, vol. 123, no. 1, pp. 52-55, January 2001.
2. D. S. Goldin, S. L. Venneri, and A. K. Noor (2000), "The Great out of the Small", Mechanical Engineering, vol. 122, no. 11, pp. 70-79, November 2000.
3. National Nanotechnology Initiative: The Initiative and its Implementation Plan, National Science and Technology Council, Committee in Technology, Subcommittee on Nanoscale Science, Engineering and Technology, July 2000.
4. Nanoscale Science, Engineering and Technology Research Directions, Oak Ridge National Laboratory, U. S. Department of Energy, ca. 2000.
5. Nanotechnology: Shaping the World Atom by Atom, National Science and Technology Council, Committee in Technology, The Interagency Working Group on Nanoscience, Engineering and Technology (IWGN), September 1999.
6. C. Bauer, A. Bugacov, B. E. Koel, A. Madhukar, N. Montoya, T. R. Ramachandran, A. A. G. Requicha, R. Resch, and P. Will, "Nanoparticle Manipulation by Mechanical Pushing: Underlying Phenomena and Real-Time Monitoring", Nanotechnology, vol. 9, no. 4, pp. 360-364, December 1999.
7. L. T. Hansen, A. Kuhle, A. H. Sorensen, J. Bohr, and P. E. Lindelof, "A Technique for Positioning Nanoparticles Using and Atomic Force Microscope", Nanotechnology, vol. 9, no. 4, pp. 337-342, December 1998.
8. T. I. Kamins and R. S. Williams, "Lithographic Positioning of Self-Assembled Ge Islands on Si (001)", Applied Physics Letters, vol. 71, issue 9, pp. 1201-1203, September 1, 1997.
9. G. Binning, H. Roher, C. H. Gerber, and E. Weibel, "Surface Studies by Scanning Tunneling Microscopy", Physical Review Letter, vol. 49, no. 1, pp. 57-61, July 5, 1982.
10. G. Binning, C. F. Quate, and C. H. Gerber, "Atomic Force Microscope", Physical Review Letter, vol. 56, no. 9, pp. 930-933, March 3, 1986.
11. R. M. Taylor II, The Nanomanipulator: A Virtual-Reality Interface to a Scanning Tunneling Microscope, Ph. D. Dissertation, Department of Computer Science, University of North Carolina at Chapel Hill, May 1994.
12. S. Paulson, A. Helser, M. B. Nardelli, R. M. Taylor II, M. Falvo, R. Superfine, and S. Washburn, "Tunable Resistance of a Carbon Nanotube-Graphite Interface", Science, vol. 290, pp. 1742-1744, December 1, 2000.
13. M. F. Yu, M. J. Dyer, H. W. Rohrs, X. K. Lu, K. D. Ausman, J. V. Her, and R. S. Ruoff, "Three-Dimensional Manipulation of Carbon Nanotubes under a Scanning Electron Microscope", Nanotechnology, vol. 10, pp. 244-252, 1999.
14. M. F. Yu, O. Lourie, M. J. Dyer, K. Molon, T. F. Kelly, and R. S. Ruoff, "Strength and Breaking Mechanism of Multi-Walled Carbon Nanotubes under Tensile Load", Science, vol. 287, pp. 637-640, January 28, 2000.
15. R. Resch, C. Bauer, A. Bugacov, B. E. Koel, P. M. Echternach, A. Madhukar, N. Montoya, A. A. G. Requicha, and P. Will (1999), "Linking and Manipulation of Gold Multinanoparticle Structures Using Dithiols and Scanning Force Microscopy", Journal of Physical Chemistry B, vol. 103, pp. 3647-3650, 1999.
16. Nanotechnology Research Directions: IWGN Workshop Report, National Science and Technology Council, Committee in Technology, IWGN, September 1999.
17. M. Hoummady and H. Fujita, "Micromachines for Nanoscale Science and Technology", Nanotechnology, vol. 10, no. 1, pp. 29-33, March 1999.
18. R. C. Merkle, "Convergent Assembly", Nanotechnology, vol. 8, no. 1, pp. 18-22, March 1997.
19. H. Noji, "The Rotary Enzyme of the Cell: The Rotation of Fl-ATPase", Science, vol. 282, pp. 1844-1845, December 4, 1998.
20. A. H. Slocum, J. H. Lang, P. E. Laibinis, M. P. Brenner, and G. Barbastathis, "Creating the Nanogate for Experimental Verification and Development of Flow and Particle Behavior in Sub-Micron Channels", NSF Grant # DMI-0002934, September 15, 2000.
21. W.-J. Kim, High-Precision Planar Magnetic Levitation, Ph. D. Dissertation, Massachusetts Institute of Technology, June 1997.
22. W.-J. Kim, "Six-Axis Nano-Positioning with Planar Magnetic Levitation", IEEE-Nano 2001, First IEEE Conference on Nanotechnology, October 2001.
23. W.-J. Kim and D. L. Trumper, "High-Precision Magnetic Levitation Stage for Photolithography", Precision Engineering, vol. 22, no. 2, pp. 66-77, April 1998.
24. W.-J. Kim, D. L. Trumper, and J. H. Lang, "Modeling and Vector Control of Planar Magnetic Levitator." IEEE Transactions on Industiy Applications, vol. 34, no. 6, pp. 1254-1262, November/December 1998.
25. D. L. Trumper, W.-J. Kim, and M. E. Williams, "Design and Analysis Framework for Permanent-Magnet Machines", IEEE Transactions on Industry Applications, vol. 32, no. 2, pp. 371-379, March/April 1996.