Modeling and vector control of planar magnetic levitator

IEEE Transactions on Industry Applications

Volumn 34, Issue 6, 1998, Pages 1254-1262

  Kim, W J ^a   Trumper, D L ^a   Lang, J H ^a  

^a Satcon Technology Corporation   (United States)

Author keywords

Dq theory; Linear permanent magnet motor; Magnetic levitation; Photolithography; Precision position control; Vector control

Indexed keywords

ELECTRIC COMMUTATION; ELECTRIC CURRENTS; MAGNETIC LEVITATION; MATHEMATICAL TRANSFORMATIONS; PERMANENT MAGNETS; PHOTOLITHOGRAPHY; POSITION CONTROL; STATORS; STEP RESPONSE; VECTORS;

MAGNETIC LEVITATION MOTORS; VECTOR CONTROL;

LINEAR MOTORS;

EID: 0032202374     PISSN: 00939994     EISSN: None     Source Type: Journal    
DOI: 10.1109/28.738999     Document Type: Article

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