Rigorous simulation and optimization of the lithography/directed self-assembly co-process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 9052, Issue , 2014, Pages

  Fühner, Tim ^a   Welling, Ulrich ^b   Müller, Marcus ^b   Erdmann, Andreas ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Coarse grained polymer model; Directed self assembly of block copolymers; Lithography simulation; Monte Carlo simulation

Indexed keywords

BLOCK COPOLYMERS; INTELLIGENT SYSTEMS; SELF ASSEMBLY;

APPROPRIATE METRICS; DIRECTED SELF-ASSEMBLY; LITHOGRAPHY SIMULATION; MONTE CARLO SIMULATORS; MONTE-CARLO SIMULATIONS; POLYMER MODELING; PROCESS PERFORMANCE; RIGOROUS SIMULATION;

LITHOGRAPHY;

EID: 84901792733     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2047381     Document Type: Conference Paper

References (19)

1. Bencher, C., Yi, H., Zhou, J., Cai, M., Smith, J., Miao, L., Montal, O., Blitshtein, S., Lavi, A., Dotan, K., Dai, H., Cheng, J. Y., Sanders, D. P., Tjio, M., and Holmes, S., "Directed self-assembly defectivity assessment. Part II," in [Proc. SPIE], 83230N-83230N-10 (Mar. 2012).
2. Iwama, T., Laachi, N., Delaney, K. T., Kim, B., Hur, S.-M., Bristol, R., Shykind, D., Weinheimer, C. J., and Fredrickson, G. H., "The Hole Shrink Problem: Directed Self-Assembly Using Self-Consistent Field Theory," Journal of Photopolymer Science and Technology 26(1), 15-20 (2013).
3. Kodera, K., Maeda, S., Tanaka, S., Mimotogi, S., Seino, Y., Yonemitsu, H., Sato, H., and Azuma, T., "Novel error mode analysis method for graphoepitaxial directed self-assembly lithography based on the dissipative particle dynamics method," in [Proc. SPIE], 868015 (Mar. 2013).
4. Lai, K., Liu, C.-c., Pitera, J., Dechene, D. J., Schepis, A., Abdallah, J., Tsai, H., Guillorn, M., Cheng, J., Doerk, G., Tjio, M., Rettner, C., Odesanya, O., Ozlem, M., and Lafferty, N., "Computational aspects of optical lithography extension by directed self-assembly," in [Proc. SPIE], 868304 (Apr. 2013).
5. Latypov, A., Preil, M., Schmid, G., Xu, J., Yi, H., Yoshimoto, K., and Zou, Y., "Exploration of the directed self-assembly based nano-fabrication design space using computational simulations," in [Proc. SPIE], 868013 (Mar. 2013).
6. Seino, Y., Yonemitsu, H., Sato, H., Kanno, M., Kato, H., Kobayashi, K., Kawanishi, A., Azuma, T., Muramatsu, M., Nagahara, S., Kitano, T., and Toshima, T., "Contact hole shrink process using directed self-assembly," in [Proc. SPIE], 83230Y-83230Y-7 (Mar. 2012).
7. Tiron, R., Gharbi, A., Argoud, M., Chevalier, X., Belledent, J., Pimmenta Barros, P., Navarro, C., Cunge, G., Barnola, S., Pain, L., Asai, M., and Pieczulewski, C., "The potential of block copolymer's directed self-assembly for contact hole shrink and contact multiplication," in [Proc. SPIE], 868012 (Mar. 2013).
8. Yoshimoto, K. and Taniguchi, T., "Large-scale dynamics of directed self-assembly defects on chemically pre-patterned surface," in [Proc. SPIE], 86801I (Mar. 2013).
9. Müller, M. and de Pablo, J. J., "Computational approaches for the dynamics of structure formation in self-assembling polymeric materials," Annu. Rev. Mater. Sci. 43, 1 (2013).
10. Praprotnik, M., delle Site, L., and Kremer, K., "Multiscale simulation of soft matter: from scale bridging to adaptive resolution," Ann. Rev. Phys. Chem. 59, 545-571 (2008).
11. Müller, M., "Studying amphiphilic self-assembly with soft coarse-grained models," J. Stat. Phys. 145, 967 (2011).
12. Daoulas, K. C., Müller, M., de Pablo, J. J., Nealey, P. F., and Smith, G. D., "Morphology of multi-component polymer systems: Single chain in mean field simulation studies," Soft Matter 2, 573-583 (2006).
13. Daoulas, K. C. and Müller, M., "Single chain in mean field simulations: Quasi-instantaneous field approximation and quantitative comparison with Monte Carlo simulations," J. Chem. Phys. 125, 184904 (2006).
14. Tuckerman, M., Berne, B., and Martyna, G., "Reversible multiple time scale molecular dynamics," J. Chem. Phys. 97, 1990 (1992).
15. Müller, M. and Daoulas, K. C., "Speeding up intrinsically slow collective processes in particle simulations by concurrent coupling to a continuum description," Phys. Rev. Lett. 107, 227801 (2011).
16. Rossky, P. J., Doll, J. D., and Friedman, H. L., "Brownian dynamics as smart Monte-Carlo simulation," J. Chem. Phys. 69, 4628-4633 (1978).
17. Li, W. and Wickham, R. A., "Influence of the surface field on the self-assembly of a diblock copolymer melt confined in a cylindrical nanopore," Macromolecules 42, 7530-7536 (2009).
18. Müller, M. and Daoulas, K. C., "Single-chain dynamics in a homogeneous melt and a lamellar microphase: A comparison between smart-Monte-Carlo dynamics, slithering-snake dynamics, and slip-link dynamics," J. Chem. Phys. 129, 164906 (2008).
19. Fühner, T., Schnattinger, T., Ardelean, G., and Erdmann, A., "Dr.LiTHO: a development and research lithography simulator," in [Proc. SPIE], 65203F, SPIE (2007).