Large-scale dynamics of directed self-assembly defects on chemically pre-patterned surface

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8680, Issue , 2013, Pages

  Yoshimoto, Kenji ^a   Taniguchi, Takashi ^b  

^a KYOTO UNIVERSITY   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Annealing; Block copolymers; Defects; DSA; Dynamics; Model; Simulation

Indexed keywords

DIRECTED SELF-ASSEMBLY; DSA; LARGE-SCALE DYNAMICS; MONTE CARLO SIMULATIONS; MORPHOLOGICAL DEFECTS; REASONABLE ACCURACY; SIMULATION; THERMAL FLUCTUATIONS;

ANNEALING; BLOCK COPOLYMERS; DEFECTS; DYNAMICS; ITERATIVE METHODS; MODELS; MONTE CARLO METHODS; SELF ASSEMBLY; SIMULATED ANNEALING; SURFACE DEFECTS;

COMPUTER SIMULATION;

EID: 84878392777     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2011826     Document Type: Conference Paper

References (11)

1. Ohta, T. and Kawasaki, K., "Equilibrium morphology of block copolymer melts," Macromolecules 19(10), 2621-2632 (1986).
2. Detcheverry, F. A., Liu, G., Nealey, P. F., and de Pablo, J. J., "Interpolation in the directed assembly of block copolymers on nanopatterned substrates: simulation and experiments," Macromolecules 43(7), 3446-3454 (2010).
3. http://www.itrs.net/Links/2012ITRS/2012Chapters/2012Overview.pdf
4. Latypov, A. M., Preil, M., Schmid, G. M., Xu, J., Yi, H., Yoshimoto, K., and Zou, Y., "Exploration of the directed self-assemblybased nanofabrication design space using computational simulations," SPIE Proc., to be published (2013).
5. Hall, D. M., Lookman, T., Fredrickson, G. H., and Banerjee, S., "Numerical method for hydrodynamic transport of inhomogeneous polymer melts," J. Comp. Phys. 224(2), 681?698 (2007).
6. Nakano, T., Matsukuma, M., Matsuzaki, K., Muramatsu, M., Tomita, T. and Kitano, T., "Dissipative particle dynamics study on directed self-assembly in holes," SPIE Proc., to be published (2013).
7. Sato, H., Yonemitsu, H., Seino, Y., Kato, H., Kanno, M., Kobayashi, K., Kawanishi, A., Kodera, K., and Azuma, T., "Dissipative particle dynamics simulations to optimize contact hole shrink process using graphoepitaxial directed self assembly," SPIE Proc., to be published (2013).
8. Lawson, R. A., Peters, A., Ludovico, P., Henderson, C. L., "Coarse grained molecular dynamics model of block copolymer directed self-assembly," SPIE Proc., to be published (2013).
9. Patrone, P. N., and Gallatin, G. M., "Modeling Line Edge Roughness in Templated, Lamellar Block Copolymer Systems," Macromolecules 45(11), 9507 - 9516 (2012).
10. Matsen, M. W. and Bates, F. S., "Unifying Weak- and Strong-Segregation Block Copolymer Theories," Macromolecules 29(4), 1091-1098 (1996).
11. Patel, K., Wallow, T. I., Levinson, H. J., and Spanos, C., "Comparative Study of Line Width Roughness (LWR) in Next-Generation Lithography (NGL) Processes," Proc. SPIE 7640, 76400T (2010).