Exploration of the directed self-assembly based nano-fabrication design space using computational simulations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8680, Issue , 2013, Pages

  Latypov, Azat ^a   Preil, Moshe ^a   Schmid, Gerard ^a   Xu, Ji ^a   Yi, He ^a   Yoshimoto, Kenji ^a,b   Zou, Yi ^a  

^a IBM MICROELECTRONICS   (United States)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

BCP; Block copolymers; Directed self assembly; DSA; Monte Carlo; SCFT

Indexed keywords

BCP; DIRECTED SELF-ASSEMBLY; DSA; MONTE CARLO; SCFT;

BLOCK COPOLYMERS; SIMULATED ANNEALING;

SELF ASSEMBLY;

EID: 84878406138     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2011238     Document Type: Conference Paper

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