The hole shrink problem: Directed self-assembly using self-consistent field theory

Journal of Photopolymer Science and Technology

Volumn 26, Issue 1, 2013, Pages 15-20

  Iwama, Tatsuhiro ^a,b   Laachi, Nabil ^b   Delaney, Kris T ^b   Kim, Bongkeun ^b   Hur, Su Mi ^b   Bristol, Robert ^c   Shykind, David ^c   Weinheimer, Corey J ^c   Fredrickson, Glenn H ^b  

^a Asahi Kasei Pharma Corporation   (Japan)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

Contact holes; Directed self assembly; Graphoepitaxy; Hole shrink problem; Oval; Self consistent field theory (SCFT)

Indexed keywords

EID: 84880802769     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.26.15     Document Type: Article

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