Dr.LiTHO - A development and research lithography simulator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6520, Issue PART 3, 2007, Pages

  Fühner, Tim ^a   Schnattinger, Thomas ^a   Ardelean, Gheorghe ^a   Erdmann, Andreas ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

Author keywords

Python; Simulation programs; Software design; Visualization

Indexed keywords

COMPUTER PROGRAMMING LANGUAGES; MATHEMATICAL MODELS; PARAMETER ESTIMATION; SOFTWARE DESIGN; USER INTERFACES; VISUALIZATION;

INTEGRATION PLATFORM; LITHOGRAPHY SIMULATOR; PARAMETER SETTINGS; SCRIPTING LANGUAGES;

LITHOGRAPHY;

EID: 35148889367     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.709535     Document Type: Conference Paper

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