Sub-1-volt piezoelectric nanoelectromechanical relays with millivolt switching capability

IEEE Electron Device Letters

Volumn 35, Issue 6, 2014, Pages 669-671

  Zaghloul, Usama ^a,b   Piazza, Gianluca ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b Electronics Research Institute   (Egypt)

Author keywords

Aluminum nitride (AlN); millivolt switching; nanoelectromechanical systems (NEMS); piezoelectric; relay

Indexed keywords

ALUMINUM NITRIDE; ENERGY DISSIPATION; ULTRATHIN FILMS;

ALUMINUM NITRIDE (ALN); ALUMINUM NITRIDE FILMS; EXPERIMENTAL DEMONSTRATIONS; LOW ENERGY DISSIPATIONS; NANO ELECTROMECHANICAL SYSTEMS; NANO-ELECTROMECHANICAL; PIEZOELECTRIC; RELAY;

PIEZOELECTRICITY;

EID: 84901490274     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2014.2318049     Document Type: Article

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