Ultralow voltage crossbar nonvolatile memory based on energy-reversible NEM switches

IEEE Electron Device Letters

Volumn 30, Issue 6, 2009, Pages 626-628

  Akarvardar, Kerem ^a   Wong, H S Philip ^a  

^a Stanford University   (United States)

Author keywords

Low voltage; Nanoelectromechanical systems (NEMS); Nonvolatile (NV) memory

Indexed keywords

BEAM BENDING; CELL SELECTION; CROSSBAR ARRAYS; DISPLACEMENT CURRENTS; ELASTIC POTENTIAL ENERGY; FEATURE SIZES; LOW VOLTAGE; NANO-ELECTROMECHANICAL; NANOELECTROMECHANICAL SYSTEMS (NEMS); NON-VOLATILE; NON-VOLATILE MEMORIES; NONVOLATILE (NV) MEMORY; NONVOLATILITY; NS SWITCHING; OPERATION VOLTAGE; SWITCHING ENERGY; SWITCHING SPEED; ULTRALOW VOLTAGE; WORKFUNCTION ENGINEERING;

NEMS;

SWITCHING;

EID: 67649365838     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2009.2018289     Document Type: Article

References (20)

1. R. Bez, E. Camerlenghi, A. Modelli, and A. Visconti, "Introduction to Flash memory," Proc. IEEE, vol. 91, no. 4, pp. 489-501, Apr. 2003.
2. T. Rueckes, K. Kim, E. Joselevich, G. Y. Tseng, C.-L. Cheung, and C. M. Lieber, "Carbon nanotube-based nonvolatile random access memory for molecular computing," Science, vol. 289, no. 5476, pp. 94-97, Jul. 2000.
3. C. G. Smith, R. van Kampen, J. Popp, D. Lacy, D. Pinchetti, M. Renault, V. Joshi, and M. A. Beunder, "Nano-mechanical cantilever arrays for low-power and low-voltage embedded nonvolatile memory applications," Proc. SPIE, vol. 6464, p. 646 406, 2007.
4. W. Y. Choi, H. Kam, D. Lee, J. Lai, and T.-J. King Liu, "Compact nanoelectro-mechanical non-volatile memory (NEMory) for 3D Integration," in IEDM Tech. Dig., 2007, pp. 603-606.
5. D. Grogg, C. Meinen, D. Tsamados, H. C. Tekin, M. Kayal, and A. M. Ionescu, "Double gate movable body micro-electro-mechanical FET as hysteretic switch: Application to data transmission systems," in ESSDERC, 2008, pp. 302-305.
6. C. Durand, F. Casset, P. Renaux, N. Abelé, B. Legrand, D. Renaud, E. Ollier, P. Ancey, A. M. Ionescu, and L. Buchaillot, "In-plane siliconon-nothing nanometer-scale resonant suspended gate MOSFET for in-IC integration perspectives," IEEE Electron Device Lett., vol. 29, no. 5, pp. 494-496, May 2008.
7. H. Kam, D. T. Lee, R. T. Howe, and T.-J. King, "A new nano-electromechanical field effect transistor (NEMFET) design for low-power electronics," in IEDM Tech. Dig., 2005, pp. 463-466.
8. F. Delrio, M. P. De Boer, J. A. Knapp, E. D. Reedy, Jr., P. J. Clews, and M. L. Dunn, "The role of van der Waals forces in adhesion of micromachined surfaces," Nat. Mater., vol. 4, no. 8, pp. 629-634, Aug. 2005.
9. K. Akarvardar, D. Elata, R. Parsa, G. C. Wan, K. Yoo, J. Provine, P. Peumans, R. T. Howe, and H.-S. P. Wong, "Design considerations for complementary nanoelectromechanical logic gates," in IEDM Tech. Dig. 2007, pp. 299-302.
10. Y. Taur and T. H. Ning, Fundamentals of Modern VLSI Devices. Cambridge, U.K.: Cambridge Univ. Press, 1998.
11. K. Akarvardar, D. Elata, R. T. Howe, and H.-S. P. Wong, "Energy-reversible complementary NEM logic gates," in DRC, 2008, pp. 69-70.
12. P. Renaud, B. Kloeck, and L. Falco, "Switching device," U.S. Patent 5 794 761, Aug. 18, 1998.
13. L. S. Pakula, P. J. French, and H. Yang, "Low voltage, high speed RF switch with high switching capacitance ratio," in IEEE Sensors, 2005, pp. 480-483.
14. A. Sheikholeslami and P. G. Gulak, "A survey of circuit innovations in FeRAMs," Proc. IEEE, vol. 88, no. 5, pp. 667-689, May 2000.
15. G. M. Rebeiz, RF MEMS: Theory, Design and Technology. Hoboken, NJ: Wiley, 2003.
16. J. R. Jones, "Coincident current ferrite core memories," Byte Mag. vol. 1, no. 11, pp. 6-16, 1976.
17. A. Fazio, "Future directions of nonvolatile memory technologies," in Proc. Mater. Res. Soc. Symp., 2005, vol. 830, p. D.1.1.1.
18. ITRS Report: Emerging research devices#Hi], 2007. Available: http:// www.itrs.net/
19. Z. Tang, Y. Xu, G. Li, and N. R. Aluru, "Physical models for coupled electromechanical analysis of silicon nanoelectromechanical systems," J. Appl. Phys., vol. 97, no. 11, p. 114 304, Jun. 2005.
20. C. M. Mate, Tribology on the Small Scale. London, U.K.: Oxford Univ. Press, 2008.