10-25 NM piezoelectric nano-actuators and NEMS switches for millivolt computational logic

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2013, Pages 233-236

  Zaghloul, Usama ^a   Piazza, Gianluca ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE (ALN); COMPUTATIONAL LOGIC; MEMORY APPLICATIONS; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC FILM; SUBTHRESHOLD SLOPE; SWITCHING ENERGY; ULTRA-LOW POWER;

ALUMINUM NITRIDE; LOGIC PROGRAMMING; MEMS; PIEZOELECTRICITY; TIME SWITCHES; ULTRATHIN FILMS;

PIEZOELECTRIC ACTUATORS;

EID: 84875440122     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2013.6474220     Document Type: Conference Paper

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