The effect of deposition energy of energetic atoms on the growth and structure of ultrathin amorphous carbon films studied by molecular dynamics simulations

Journal of Physics D: Applied Physics

Volumn 47, Issue 24, 2014, Pages

  Wang, N ^a   Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

atomic ordering; deposition energy; energetic atoms; growth; Molecular dynamics; structure; ultrathin films

Indexed keywords

AMORPHOUS CARBON; CARBON FILMS; DEPOSITION; GROWTH (MATERIALS); MOLECULAR DYNAMICS; MULTILAYER FILMS; STRUCTURE (COMPOSITION); ULTRATHIN FILMS;

ATOMIC HYBRIDIZATION; ATOMIC INTERACTIONS; ATOMIC ORDERING; DEPOSITION ENERGY; DIFFERENT STRUCTURE; FILM CHARACTERISTICS; MOLECULAR DYNAMICS SIMULATIONS; SECOND GENERATION;

ATOMS;

EID: 84901463826     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/47/24/245303     Document Type: Article

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