Three-mask polysilicon thin-film transistor biosensor

IEEE Transactions on Electron Devices

Volumn 61, Issue 6, 2014, Pages 2170-2176

  Sun, Kai ^a   Zeimpekis, Ioannis ^a   Lombardini, Marta ^a   Ditshego, Nonofo M Jack ^a   Pearce, Stuart J ^a   Kiang, Kian S ^a   Thomas, Owain ^b   De Planque, Maurits R R ^a   Chong, Harold M H ^a   Morgan, Hywel ^a   Ashburn, Peter ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

Author keywords

Biosensor; pH sensor; plasma chemical vapor deposition; semiconductor device fabrication; thin film transistors (TFTs).

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; ELECTRIC RESISTANCE; ION IMPLANTATION; LITHOGRAPHY; NANOWIRES; OHMIC CONTACTS; PH SENSORS; PLASMA CVD; POLYSILICON; SEMICONDUCTING ORGANIC COMPOUNDS; SEMICONDUCTOR DOPING; THIN FILM TRANSISTORS; TITANIUM NITRIDE;

ADVANCED LITHOGRAPHY; PLASMA CHEMICAL VAPOR DEPOSITION; POLYSILICON THIN-FILM TRANSISTORS; RESILIENT MATERIALS; SEMICONDUCTOR DEVICE FABRICATION; SILICON-ON-INSULATOR CMOS; THIN-FILM TECHNOLOGY; THIN-FILM TRANSISTOR (TFTS);

BIOSENSORS;

EID: 84901367000     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2014.2315669     Document Type: Article

References (20)

1. Y. Cui, Q. Q. Wei, H. K. Park, and C. M. Lieber, "Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species," Science, vol. 293, no. 5533, pp. 1289-1292, Aug. 2001. (Pubitemid 32777412)
2. G. F. Zheng, F. Patolsky, Y. Cui, W. U. Wang, and C. M. Lieber, "Multiplexed electrical detection of cancer markers with nanowire sensor arrays," Nature Biotechnol., vol. 23, no. 10, pp. 1294-1301, Oct. 2005. (Pubitemid 41486858)
3. W. Lu, P. Xie, and C. M. Lieber, "Nanowire transistor performance limits and applications," IEEE Trans. Electron Devices, vol. 55, no. 11, pp. 2859-2876, Nov. 2008.
4. Z. Li, Y. Chen, X. Li, T. I. Kamins, K. Nauka, and R. S. Williams, "Sequence-specific label-free DNA sensors based on silicon nanowires," Nano Lett., vol. 4, no. 2, pp. 245-247, Feb. 2004. (Pubitemid 38292895)
5. Y. L. Bunimovich, Y. S. Shin, W. S. Yeo, M. Amori, G. Kwong, and J. R. Heath, "Quantitative real-time measurements of DNA hybridization with alkylated nonoxidized silicon nanowires in electrolyte solution," J. Amer. Chem. Soc., vol. 128, no. 50, pp. 16323-16331, Dec. 2006. (Pubitemid 44936627)
6. B. R. Dorvel et al., "Silicon nanowires with high-k hafnium oxide dielectrics for sensitive detection of small nucleic acid oligomers," ACS Nano, vol. 6, no. 7, pp. 6150-6164, Jul. 2012.
7. I. Y. Park, Z. Y. Li, X. M. Li, A. P. Pisano, and R. S. Williams, "Towards the silicon nanowire-based sensor for intracellular biochemical detection," Biosensors Bioelectron., vol. 22, nos. 9-10, pp. 2065-2070, Apr. 2007. (Pubitemid 46349646)
8. A. Tarasov et al., "True reference nanosensor realized with silicon nanowires," Langmuir, vol. 28, no. 25, pp. 9899-9905, Jun. 2012.
9. G. J. Zhang et al., "Silicon nanowire biosensor for highly sensitive and rapid detection of dengue virus," Sens. Actuators B, Chem., vol. 146, no. 1, pp. 138-144, Apr. 2010.
10. E. Stern et al., "Label-free immunodetection with CMOS-compatible semiconducting nanowires," Nature, vol. 445, no. 7127, pp. 519-522, Feb. 2007. (Pubitemid 46197629)
11. M. H. Lee, K. N. Lee, S. W. Jung, W. H. Kim, K. S. Shin, and W. K. Seong, "Quantitative measurements of C-reactive protein using silicon nanowire arrays," Int J. Nanomed., vol. 3, no. 1, pp. 117-124, Mar. 2008.
12. S. Y. Chen, J. G. Bomer, W. G. van der Wiel, E. T. Carlen, and A. van den Berg, "Top-down fabrication of sub-30 nm monocrystalline silicon nanowires using conventional microfabrication," ACS Nano, vol. 3, no. 11, pp. 3485-3492, Nov. 2009.
13. H. C. Lin, M. H. Lee, C. J. Su, T. Y. Huang, C. C. Lee, and Y. S. Yang, "A simple and low-cost method to fabricate TFTs with poly-Si nanowire channel," IEEE Electron Device Lett., vol. 26, no. 9, pp. 643-645, Sep. 2005. (Pubitemid 41430955)
14. C. Y. Hsiao et al., "Novel polysilicon nanowire field effect transistors for biosensing application," Biosensors Bioelectron., vol. 24, no. 5, pp. 1223-1229, Jan. 2009.
15. M. M. A. Hakim et al., "Thin film polycrystalline silicon nanowire biosensors," Nano Lett., vol. 12, no. 4, pp. 1868-1872, Apr. 2012.
16. G. Wenga, E. Jacques, A. C. Salaun, R. Rogel, L. Pichon, and F. Geneste, "Step-gate polysilicon nanowires field effect transistor compatible with CMOS technology for label-free DNA biosensor," Biosensors Bioelectron., vol. 40, no. 1, pp. 141-146, Feb. 2013.
17. W. Wittmer and H. Melchior, "Applications of TiN thin films in silicon device technology," Thin Solid Films, vol. 93, nos. 3-4, pp. 397-405, Jul. 1982.
18. ATLAS User's Manual: Device Simulation Software, Silvaco, Santa Clara, CA, USA, 2008.
19. P. R. Nair and M. A. Alam, "Design considerations of silicon nanowire biosensors," IEEE Trans. Electron Devices, vol. 54, no. 12, pp. 3400-3408, Dec. 2007. (Pubitemid 350225946)
20. S. A. Vitale, J. Kedzierski, P. Healey, P. W. Wyatt, and C. L. Keast, "Work-function-tuned TiN metal gate FDSOI transistors for subthreshold operation," IEEE Trans. Electron Devices, vol. 58, no. 2, pp. 419-426, Feb. 2011.