A simple and low-/cost method to fabricate TFTs with poly-Si nanowire channel

IEEE Electron Device Letters

Volumn 26, Issue 9, 2005, Pages 643-645

  Lin, H C ^a   Lee, M H ^a   Su, C J ^a   Huang, T Y ^a   Lee, C C ^a   Yang, Y S ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Nanowires; Poly Si; Sensor device; Thin film transistors (TFTs)

Indexed keywords

BIOSENSORS; CHEMICAL VAPOR DEPOSITION; NANOSTRUCTURED MATERIALS; POLYSILICON; SEMICONDUCTOR DEVICE MANUFACTURE; TRANSMISSION ELECTRON MICROSCOPY;

NANOWIRES; SENSOR DEVICE;

THIN FILM TRANSISTORS;

EID: 26444483307     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2005.853669     Document Type: Article

References (8)

1. F. L. Yang et al., "5 nm-gate nanowire FinFET," in Symp. VLSI Tech. Dig., 2004, pp. 196-197.
2. X. Duan, Y. Huang, and C. M. Lieber, "Nonvolatile memory and programmable logic from molecule-gated nanowires," Nano Lett., vol. 2, no. 5, pp. 487490, 2002.
3. M. C. McAlpine, R. S. Friedman, S. Jin, K. Lin, W. U. Wang, and C. M. Lieber, "High-performance nanowire electronics and photonics on glass and plastic substrates," Nano Lett., vol. 3, pp. 1531-1535, 2003.
4. X. Duan, C. Niu, V. Sahi, J. Chen, J. Wallace Parce, S. Empedocles, and J. L. Goldma, "High-performance thin-film transistors using semiconductor nanowires and nanoribbons," Nature, vol. 425, pp. 274-278, 2003.
5. Y. Cui, Q. Wei, H. Park, and C. M. Lieber, "Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species," Science, vol. 293, pp. 1289-1292, 2001.
6. Z. Li, Y Chen, X. Li, T. I. Kamins, K. Nauka, and R. S. Williams, "Sequence-specific label-free DNA sensors based on silicon nanowires," Nano Lett., vol. 4, pp. 245-247, 2004.
7. Y.-K. Choi, J. Zhu, J. Grunes, J. Bokor, and G. A. Somorjai, "Fabrication of sub-10-nm silicon nanowire array by size reduction lithography," J. Phys. Chem. B, At. Mol. Opt. Phys., vol. 107, p. 3340, 2003.
8. Y. Cui, X. Duan, J. Hu, and C. M. Lieber, "Doping and electrical transport in silicon nanowires," J. Phys. Chem. B, At. Mol. Opt. Phys., vol. 104, pp. 5213-5216, 2000.