메뉴 건너뛰기




Volumn 97, Issue 5, 2014, Pages 1633-1637

Carbon interlayer between CVD SiC and SiO2 in high-temperature passive oxidation

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; PHASE INTERFACES; SILICON CARBIDE; THERMOGRAVIMETRIC ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 84900850607     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/jace.12833     Document Type: Article
Times cited : (26)

References (45)
  • 1
    • 0027282886 scopus 로고
    • Corrosion of Silicon-Based Ceramics in Combussion Enviroments,"
    • N. S. Jacobson, "Corrosion of Silicon-Based Ceramics in Combussion Enviroments," J. Am. Ceram. Soc., 76 [ 1 ] 3-28 (1993).
    • (1993) J. Am. Ceram. Soc. , vol.76 , Issue.1 , pp. 3-28
    • Jacobson, N.S.1
  • 2
    • 55449112727 scopus 로고    scopus 로고
    • Silicon Carbide Power-Device Products - Status and Upcoming Challenges with a Special Attention to Taditional, Nonmilitary Industrial Applications,"
    • P. Friedrichs, "Silicon Carbide Power-Device Products-Status and Upcoming Challenges with a Special Attention to Taditional, Nonmilitary Industrial Applications," Phys. Stat. Sol. (b), 245 [ 7 ] 1232-8 (2008).
    • (2008) Phys. Stat. Sol. (B) , vol.245 , Issue.7 , pp. 1232-1238
    • Friedrichs, P.1
  • 3
    • 84865774958 scopus 로고    scopus 로고
    • Study on Compatibility between Silicon Carbide and Solid Breeding Materials under Neutron Irradiation,"
    • H. Katsui, A. Hasegawa, Y. Katoh, Y. Hatano, T. Tanaka, S. Nogami, T. Hinoki, and, T. Shikama, "Study on Compatibility Between Silicon Carbide and Solid Breeding Materials Under Neutron Irradiation," Fusion Sci. Technol., 60 [ 1 ] 288-91 (2011).
    • (2011) Fusion Sci. Technol. , vol.60 , Issue.1 , pp. 288-291
    • Katsui, H.1    Hasegawa, A.2    Katoh, Y.3    Hatano, Y.4    Tanaka, T.5    Nogami, S.6    Hinoki, T.7    Shikama, T.8
  • 6
    • 0019572889 scopus 로고
    • Boron Reditribution in Sintered α-SiC during Thermal Oxidation,"
    • J. A. Costello, R. E. Tressler, and, I. S. T. Tsong, "Boron Reditribution in Sintered α-SiC During Thermal Oxidation," J. Am. Ceram. Soc., 64 [ 6 ] 332-5 (1981).
    • (1981) J. Am. Ceram. Soc. , vol.64 , Issue.6 , pp. 332-335
    • Costello, J.A.1    Tressler, R.E.2    Tsong, I.S.T.3
  • 7
    • 0025530638 scopus 로고
    • Oxidation of SiC,"
    • J. Li, P. Eveno, and, A. M. Huntz, "Oxidation of SiC," Mater. Corros., 41 [ 12 ] 716-25 (1990).
    • (1990) Mater. Corros. , vol.41 , Issue.12 , pp. 716-725
    • Li, J.1    Eveno, P.2    Huntz, A.M.3
  • 8
    • 0016971998 scopus 로고
    • The Active Oxidation of Si and SiC in the Viscous Gas-Flow Regime,"
    • W. Hinze, and, H. C. Graham, "The Active Oxidation of Si and SiC in the Viscous Gas-Flow Regime," J. Electrochem. Soc., 123 [ 7 ] 1066-73 (1976).
    • (1976) J. Electrochem. Soc. , vol.123 , Issue.7 , pp. 1066-1073
    • Hinze, W.1    Graham, H.C.2
  • 9
    • 0016971766 scopus 로고
    • Oxidation Kinetics of Hot-Pressed Silicon Carbide,"
    • S. C. Singhal, "Oxidation Kinetics of Hot-Pressed Silicon Carbide," J. Mat. Sci., 11 [ 7 ] 1246-53 (1976).
    • (1976) J. Mat. Sci. , vol.11 , Issue.7 , pp. 1246-1253
    • Singhal, S.C.1
  • 10
    • 0024716359 scopus 로고
    • High-Temperature Passive Oxidation of Chemically Vapor Deposited Silicon Carbide,"
    • T. Narushima, T. Goto, and, T. Hirai, "High-Temperature Passive Oxidation of Chemically Vapor Deposited Silicon Carbide," J. Am. Ceram. Soc., 72 [ 8 ] 1386-90 (1989).
    • (1989) J. Am. Ceram. Soc. , vol.72 , Issue.8 , pp. 1386-1390
    • Narushima, T.1    Goto, T.2    Hirai, T.3
  • 11
    • 84985080531 scopus 로고
    • High-Temperature Oxidation of Chemically Vapor-Deposited Silicon Carbide in Wet Oxygen at 1823 to 1923 K,"
    • T. Narushima, T. Goto, Y. Iguchi, and, T. Hirai, "High-Temperature Oxidation of Chemically Vapor-Deposited Silicon Carbide in Wet Oxygen at 1823 to 1923 K," J. Am. Ceram. Soc., 73 [ 12 ] 3580-4 (1990).
    • (1990) J. Am. Ceram. Soc. , vol.73 , Issue.12 , pp. 3580-3584
    • Narushima, T.1    Goto, T.2    Iguchi, Y.3    Hirai, T.4
  • 14
    • 0031249110 scopus 로고    scopus 로고
    • High-Temperature Oxidation of Silicon Carbide and Silicon Nitride,"
    • T. Narushima, T. Goto, T. Hirai, and, Y. Iguchi, "High-Temperature Oxidation of Silicon Carbide and Silicon Nitride," Mater. Trans. JIM 38 [ 10 ] 821-35 (1997).
    • (1997) Mater. Trans. JIM , vol.38 , Issue.10 , pp. 821-835
    • Narushima, T.1    Goto, T.2    Hirai, T.3    Iguchi, Y.4
  • 19
    • 84873745080 scopus 로고    scopus 로고
    • Oxidation Transition for SiC Part II. Passive-to-Active Transitions,"
    • B. Harder, N. Jacobson, and, D. Myers, "Oxidation Transition for SiC Part II. Passive-to-Active Transitions," J. Am. Ceram. Soc., 96 [ 2 ] 606-12 (2013).
    • (2013) J. Am. Ceram. Soc. , vol.96 , Issue.2 , pp. 606-612
    • Harder, B.1    Jacobson, N.2    Myers, D.3
  • 20
    • 84900841235 scopus 로고
    • Oxidation Behavior of Chemically Vapor-Deposited Silicon Carbide," Rept. No. GA-A: 18696, GA Technologies Inc. San Diego, CA
    • G. H. Schiroky, "Oxidation Behavior of Chemically Vapor-Deposited Silicon Carbide," Rept. No. GA-A: 18696, GA Technologies Inc., San Diego, CA, 1986.
    • (1986)
    • Schiroky, G.H.1
  • 21
    • 84987299792 scopus 로고
    • Oxidation Characteristics of CVD Silicon Carbide and Silicon Nitride,"
    • G. H. Schiroky, R. J. Price, and, J. E. Sheehan, "Oxidation Characteristics of CVD Silicon Carbide and Silicon Nitride," GA Technologies Inc., 2 [ 2 ] 137-41 (1987).
    • (1987) GA Technologies Inc. , vol.2 , Issue.2 , pp. 137-141
    • Schiroky, G.H.1    Price, R.J.2    Sheehan, J.E.3
  • 23
    • 0035526631 scopus 로고    scopus 로고
    • Oxygen Transport in Silica at High Temperature Implications of Oxidation Kinetics,"
    • C. E. Ramberg, and, W. L. Worrell, "Oxygen Transport in Silica at High Temperature Implications of Oxidation Kinetics," J. Am. Ceram. Soc., 84 [ 11 ] 2607-16 (2001).
    • (2001) J. Am. Ceram. Soc. , vol.84 , Issue.11 , pp. 2607-2616
    • Ramberg, C.E.1    Worrell, W.L.2
  • 24
    • 0026631905 scopus 로고
    • The Role of Condensed Silicon Monoxide in the Active-to-Passive Oxidation Transition of Silicon Carbide,"
    • K. G. Nickel, "The Role of Condensed Silicon Monoxide in the Active-to-Passive Oxidation Transition of Silicon Carbide," J. Eur. Ceram. Soc., 9 [ 1 ] 3-8 (1992).
    • (1992) J. Eur. Ceram. Soc. , vol.9 , Issue.1 , pp. 3-8
    • Nickel, K.G.1
  • 25
    • 0025483251 scopus 로고
    • Oxidation of Single-Crystal Silicon Carbide Part II. Kinetic Model,"
    • Z. Zheng, R. E. Tressler, and, K. E. Spear, "Oxidation of Single-Crystal Silicon Carbide Part II. Kinetic Model," J. Electrochem. Soc., 137 [ 9 ] 2812-6 (1990).
    • (1990) J. Electrochem. Soc. , vol.137 , Issue.9 , pp. 2812-2816
    • Zheng, Z.1    Tressler, R.E.2    Spear, K.E.3
  • 26
    • 0025398687 scopus 로고
    • Oxidation of Single-Crystal Silicon Carbide Part I. Experimental Studies,"
    • Z. Zheng, R. E. Tressler, and, K. E. Spear, "Oxidation of Single-Crystal Silicon Carbide Part I. Experimental Studies," J. Electrochem. Soc., 137 [ 3 ] 854-8 (1990).
    • (1990) J. Electrochem. Soc. , vol.137 , Issue.3 , pp. 854-858
    • Zheng, Z.1    Tressler, R.E.2    Spear, K.E.3
  • 27
    • 84987344259 scopus 로고
    • Oxidation Kinetics of Silicon Carbide Crystals and Ceramics: I, in Dry Oxygen,"
    • J. A Costello, and, R. E. Tressler, "Oxidation Kinetics of Silicon Carbide Crystals and Ceramics: I, in Dry Oxygen," J. Am. Ceram. Soc., 69 [ 9 ] 674-81 (1986).
    • (1986) J. Am. Ceram. Soc. , vol.69 , Issue.9 , pp. 674-681
    • Costello, J.A.1    Tressler, R.E.2
  • 28
    • 1642621158 scopus 로고
    • General Relationship for the Thermal Oxidation of Silicon,"
    • D. E. Deal, and, A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys., 36 [ 12 ] 3770-3778 (1965).
    • (1965) J. Appl. Phys. , vol.36 , Issue.12 , pp. 3770-3778
    • Deal, D.E.1    Grove, A.S.2
  • 29
    • 0026097278 scopus 로고
    • Some New Perspectives on Oxidation of Silicon Carbide and Silicon Nitride,"
    • K. L. Luthra, "Some New Perspectives on Oxidation of Silicon Carbide and Silicon Nitride," J. Am. Ceram. Soc., 74 [ 5 ] 1095-103 (1991).
    • (1991) J. Am. Ceram. Soc. , vol.74 , Issue.5 , pp. 1095-1103
    • Luthra, K.L.1
  • 30
    • 0015400731 scopus 로고
    • The High Temperature Oxidation, Reduction, and Volatilization Reactions of Silicon and Silicon Carbide,"
    • E. A. Gulbransen, and, S. A. Jansson, "The High Temperature Oxidation, Reduction, and Volatilization Reactions of Silicon and Silicon Carbide," Oxid. Met., 4 [ 3 ] 181-201 (1972).
    • (1972) Oxid. Met. , vol.4 , Issue.3 , pp. 181-201
    • Gulbransen, E.A.1    Jansson, S.A.2
  • 31
    • 0016349395 scopus 로고
    • Kinetic Studies on the Oxidation of Silicon Carbide"
    • Edited by R. C. Marchall, J. W. Faust Jr and C. E. Ryan. University of South Carolina Press, South Carolina, SC
    • F. Fitzer, and, R. Ebi, "Kinetic Studies on the Oxidation of Silicon Carbide"; pp. 320-328 in Silicon Carbide 1973, Edited by, R. C. Marchall, J. W. Faust Jr, and, C. E. Ryan,. University of South Carolina Press, South Carolina, SC, 1974.
    • (1974) Silicon Carbide 1973 , pp. 320-328
    • Fitzer, F.1    Ebi, R.2
  • 32
  • 33
    • 0026221514 scopus 로고
    • Kinetics and Crystallization Studies by in Situ X-ray Diffraction of the Oxidation of Chemically Vapour Deposited SiC,"
    • F. Sibieude, J. Rodríguez, and, M. T. Clavaguera-Mora, "Kinetics and Crystallization Studies by In Situ X-ray Diffraction of the Oxidation of Chemically Vapour Deposited SiC," Thin Solid Films, 204 [ 1 ] 217-27 (1991).
    • (1991) Thin Solid Films , vol.204 , Issue.1 , pp. 217-227
    • Sibieude, F.1    Rodríguez, J.2    Clavaguera-Mora, M.T.3
  • 34
    • 0016428180 scopus 로고
    • Oxidation of 6H-α Silicon Carbide Platelets,"
    • R. C. A Harris, "Oxidation of 6H-α Silicon Carbide Platelets," J. Am. Ceram. Soc., 58 [ 1-2 ] 7-9 (1975).
    • (1975) J. Am. Ceram. Soc. , vol.58 , Issue.12 , pp. 7-9
    • Harris, R.C.A.1
  • 35
    • 84886325328 scopus 로고    scopus 로고
    • Oxidation Behavior of Chemical Vapor Deposited Silicon Carbide"
    • Edited by W. Gao. Woodhead Publishing Limited, Cambridge, UK
    • T. Goto, "Oxidation Behavior of Chemical Vapor Deposited Silicon Carbide"; pp. 433-55 in Developments in High Temperature Corrosion and Protection of Materials, Edited by, W. Gao,. Woodhead Publishing Limited, Cambridge, UK, 2008.
    • (2008) Developments in High Temperature Corrosion and Protection of Materials , pp. 433-455
    • Goto, T.1
  • 38
    • 4244183989 scopus 로고
    • First- and Second-Order Raman Scattering from Finite-Size Crystals of Graphite,"
    • B, []
    • R. J. Nemanich, and, S. A. Solin, "First- and Second-Order Raman Scattering from Finite-Size Crystals of Graphite," Phys. Rev. B, 20 [ 2 ] 392-401 (1979).
    • (1979) Phys. Rev. , vol.20 , Issue.2 , pp. 392-401
    • Nemanich, R.J.1    Solin, S.A.2
  • 39
    • 0018336045 scopus 로고
    • Diamond-like 3-Fold Coordinated Amorphous Carbon,"
    • N. Wada, P. J. Gaczi, and, S. A. Solin, "Diamond-like 3-Fold Coordinated Amorphous Carbon," J. Non-Cryst. Solids, 35, 36 [ 1 ] 543-8 (1980).
    • (1980) J. Non-Cryst. Solids , vol.3536 , Issue.1 , pp. 543-548
    • Wada, N.1    Gaczi, P.J.2    Solin, S.A.3
  • 40
    • 33645143382 scopus 로고
    • Use of Raman Scattering to Investigate Disorder and Crystallite Formation in As-Deposited and Annealed Carbon Films,"
    • R. O. Dillon, J. A. Woollam, and, V. Katkanant, "Use of Raman Scattering to Investigate Disorder and Crystallite Formation in As-Deposited and Annealed Carbon Films," Phys. Rev. B, 29 [ 6 ] 3482-8 (1984).
    • (1984) Phys. Rev. B , vol.29 , Issue.6 , pp. 3482-3488
    • Dillon, R.O.1    Woollam, J.A.2    Katkanant, V.3
  • 41
    • 0242603790 scopus 로고    scopus 로고
    • Interpretation of Raman Spectra of Disordered and Amorphous Carbon,"
    • A. C. Ferrari, and, J. Robertson, "Interpretation of Raman Spectra of Disordered and Amorphous Carbon," Phys. Rev. B, 61 [ 20 ] 14095-107 (2000).
    • (2000) Phys. Rev. B , vol.61 , Issue.20 , pp. 14095-14107
    • Ferrari, A.C.1    Robertson, J.2
  • 42
    • 0026867756 scopus 로고
    • 2/SiC Interface in the Oxidation of CVD β-SiC,"
    • 2/SiC Interface in the Oxidation of CVD β-SiC," Surf. Sci., 271 [ 1-2 ] 237-43 (1992
    • (1992) Surf. Sci. , vol.271 , Issue.12 , pp. 237-243
    • Berjoan, R.1    Rodriguez, J.2    Sibieude, F.3
  • 43
    • 0001476866 scopus 로고    scopus 로고
    • High-Carbon Concentrations at the Silicon Dioxide-Silicon Carbide Interface Identified by Electron Energy Loss Spectroscopy,"
    • K. C. Chang, N. T. Nuhfer, L. M. Porter, and, Q. Wahab, "High-Carbon Concentrations at the Silicon Dioxide-Silicon Carbide Interface Identified by Electron Energy Loss Spectroscopy," Appl. Phys. Lett., 77 [ 14 ] 2186-8 (2000).
    • (2000) Appl. Phys. Lett. , vol.77 , Issue.14 , pp. 2186-2188
    • Chang, K.C.1    Nuhfer, N.T.2    Porter, L.M.3    Wahab, Q.4
  • 44
    • 84985108673 scopus 로고
    • Reactions of Silicon Carbide and Silicon(IV) Oxide at Elevated Temperatures,"
    • N. S. Jacobson, K. N. Lee, and, D. S. Fox, "Reactions of Silicon Carbide and Silicon(IV) Oxide at Elevated Temperatures," J. Am. Ceram. Soc., 75 [ 6 ] 1603-11 (1992).
    • (1992) J. Am. Ceram. Soc. , vol.75 , Issue.6 , pp. 1603-1611
    • Jacobson, N.S.1    Lee, K.N.2    Fox, D.S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.