메뉴 건너뛰기




Volumn 81, Issue 4, 1998, Pages 945-950

Oxidation behavior of chemically-vapor-deposited silicon carbide and silicon nitride from 1200° to 1600°C

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CHEMICAL VAPOR DEPOSITION; OXIDATION; REACTION KINETICS; SILICA; SILICON CARBIDE; SILICON NITRIDE; SODIUM;

EID: 0032050590     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1998.tb02431.x     Document Type: Article
Times cited : (98)

References (30)
  • 1
    • 84987344259 scopus 로고
    • Oxidation Kinetics of Silicon Carbide Crystals and Ceramics: I, In Dry Oxygen
    • J. A. Costello and R. E. Tressler, "Oxidation Kinetics of Silicon Carbide Crystals and Ceramics: I, In Dry Oxygen," J. Am. Ceram. Soc., 69 [9] 674-81 (1986).
    • (1986) J. Am. Ceram. Soc. , vol.69 , Issue.9 , pp. 674-681
    • Costello, J.A.1    Tressler, R.E.2
  • 3
    • 0024716359 scopus 로고
    • High-Temperature Passive Oxidation of Chemically Vapor Deposited Silicon Carbide
    • T. Narushima, T. Goto, and T. Hirai, "High-Temperature Passive Oxidation of Chemically Vapor Deposited Silicon Carbide," J. Am. Ceram. Soc., 72 [8] 1386-90 (1989).
    • (1989) J. Am. Ceram. Soc. , vol.72 , Issue.8 , pp. 1386-1390
    • Narushima, T.1    Goto, T.2    Hirai, T.3
  • 4
    • 0024664405 scopus 로고
    • Oxidation Studies of Crystalline CVD Silicon Nitride
    • H. Du, R. E. Tressler, K. E. Spear, and C. G. Pantano, "Oxidation Studies of Crystalline CVD Silicon Nitride," J. Electrochem. Soc., 136 [5] 1527-36 (1989).
    • (1989) J. Electrochem. Soc. , vol.136 , Issue.5 , pp. 1527-1536
    • Du, H.1    Tressler, R.E.2    Spear, K.E.3    Pantano, C.G.4
  • 7
    • 4344659236 scopus 로고
    • Oxidation of Chemically-Vapor-Deposited Silicon Nitride and Single-Crystal Silicon
    • D. J. Choi, D. B. Fishbach, and W. D. Scott, "Oxidation of Chemically-Vapor-Deposited Silicon Nitride and Single-Crystal Silicon," J. Am. Ceram. Soc., 72 [7] 1118-23 (1989).
    • (1989) J. Am. Ceram. Soc. , vol.72 , Issue.7 , pp. 1118-1123
    • Choi, D.J.1    Fishbach, D.B.2    Scott, W.D.3
  • 8
    • 0028403925 scopus 로고
    • Oxidation Kinetics of Chemically Vapor-Deposited Silicon Carbide in Wet Oxygen
    • E. J. Opila, "Oxidation Kinetics of Chemically Vapor-Deposited Silicon Carbide in Wet Oxygen," J. Am. Ceram. Soc., 77 [3] 730-36 (1994).
    • (1994) J. Am. Ceram. Soc. , vol.77 , Issue.3 , pp. 730-736
    • Opila, E.J.1
  • 11
    • 0027202876 scopus 로고
    • Infrared Study of Structural Changes in Silicon Oxynitride Films
    • B. Pivac, "Infrared Study of Structural Changes in Silicon Oxynitride Films," J. Mater. Sci. Lett., 12 [1] 23-26 (1993).
    • (1993) J. Mater. Sci. Lett. , vol.12 , Issue.1 , pp. 23-26
    • Pivac, B.1
  • 12
    • 84967373859 scopus 로고
    • 4 Interface: I, Nature of the Interphase
    • 4 Interface: I, Nature of the Interphase," J. Am. Ceram. Soc., 78 [5] 1272-78 (1995).
    • (1995) J. Am. Ceram. Soc. , vol.78 , Issue.5 , pp. 1272-1278
    • Ogbuji, L.U.J.T.1
  • 13
    • 84986409857 scopus 로고
    • 2 Permeation and Oxidation Reaction
    • 2 Permeation and Oxidation Reaction," J. Am. Ceram. Soc., 78 [5] 1279-84 (1995).
    • (1995) J. Am. Ceram. Soc. , vol.78 , Issue.5 , pp. 1279-1284
    • Ogbuji, L.U.J.T.1
  • 14
    • 0020849772 scopus 로고
    • Preparation of Silicon Carbide by Chemical Vapor Deposition
    • T. Narushima, T. Goto, and T. Hirai, "Preparation of Silicon Carbide by Chemical Vapor Deposition," Yogyo Kyokaishi, 91 [11] 502-509 (1983).
    • (1983) Yogyo Kyokaishi , vol.91 , Issue.11 , pp. 502-509
    • Narushima, T.1    Goto, T.2    Hirai, T.3
  • 15
    • 0016940203 scopus 로고
    • Chemical Vapor Deposited Silicon Nitride, Part I, Preparation and Some Properties
    • K. Niihara and T. Hirai, "Chemical Vapor Deposited Silicon Nitride, Part I, Preparation and Some Properties," J. Mater. Sci., 11, 593-603 (1976).
    • (1976) J. Mater. Sci. , vol.11 , pp. 593-603
    • Niihara, K.1    Hirai, T.2
  • 16
    • 0029291341 scopus 로고
    • Influence of Alumina Reaction Tube Impurities on the Oxidation of Chemically-Vapor-Deposited Silicon Carbide
    • E. Opila, "Influence of Alumina Reaction Tube Impurities on the Oxidation of Chemically-Vapor-Deposited Silicon Carbide," J. Am. Ceram. Soc., 78 [4] 1107-10 (1995).
    • (1995) J. Am. Ceram. Soc. , vol.78 , Issue.4 , pp. 1107-1110
    • Opila, E.1
  • 18
    • 0026134367 scopus 로고
    • Oxidation of Silicon Carbide in Environments Containing Potassium Salt Vapor
    • V. Pareek and D. A. Shores, "Oxidation of Silicon Carbide in Environments Containing Potassium Salt Vapor," J. Am. Ceram. Soc., 74 [3] 556-63 (1991).
    • (1991) J. Am. Ceram. Soc. , vol.74 , Issue.3 , pp. 556-563
    • Pareek, V.1    Shores, D.A.2
  • 20
    • 0026097278 scopus 로고
    • Some New Perspectives on Oxidation of Silicon Carbide and Silicon Nitride
    • K. L. Luthra, "Some New Perspectives on Oxidation of Silicon Carbide and Silicon Nitride," J. Am. Ceram. Soc., 74 [5] 1095-103 (1991).
    • (1991) J. Am. Ceram. Soc. , vol.74 , Issue.5 , pp. 1095-1103
    • Luthra, K.L.1
  • 21
    • 0027282886 scopus 로고
    • Corrosion of Silicon-Based Ceramics in Combustion Environments
    • N. S. Jacobson, "Corrosion of Silicon-Based Ceramics in Combustion Environments," J. Am. Ceram. Soc., 76 [1] 3-28 (1993).
    • (1993) J. Am. Ceram. Soc. , vol.76 , Issue.1 , pp. 3-28
    • Jacobson, N.S.1
  • 22
    • 0001652254 scopus 로고
    • Permeation of Gaseous Oxygen through Vitreous Silica
    • F. I. Norton, "Permeation of Gaseous Oxygen through Vitreous Silica," Nature (London), 191, 701 (1961).
    • (1961) Nature (London) , vol.191 , pp. 701
    • Norton, F.I.1
  • 23
    • 1642621158 scopus 로고
    • General Relationship for the Thermal Oxidation of Silicon
    • B. E. Deal and A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys., 36 [12] 3370-78 (1965).
    • (1965) J. Appl. Phys. , vol.36 , Issue.12 , pp. 3370-3378
    • Deal, B.E.1    Grove, A.S.2
  • 24
    • 0025398687 scopus 로고
    • Oxidation of Single Crystal Silicon Carbide, Part I. Experimental Studies
    • Z. Zheng, R. E. Tressler, and K. E. Spear, "Oxidation of Single Crystal Silicon Carbide, Part I. Experimental Studies," J. Electrochem. Soc., 137 [3] 854-57 (1990).
    • (1990) J. Electrochem. Soc. , vol.137 , Issue.3 , pp. 854-857
    • Zheng, Z.1    Tressler, R.E.2    Spear, K.E.3
  • 25
    • 0026849137 scopus 로고
    • The Effect of Sodium Contamination on Oxidation of Single Crystal Silicon Carbide
    • Z. Zheng, R. E. Tressler, and K. E. Spear, "The Effect of Sodium Contamination on Oxidation of Single Crystal Silicon Carbide," Corros. Sci., 33 [4] 545-56 (1992).
    • (1992) Corros. Sci. , vol.33 , Issue.4 , pp. 545-556
    • Zheng, Z.1    Tressler, R.E.2    Spear, K.E.3
  • 26
    • 0026850788 scopus 로고
    • 4 with the Oxidation of Sodium-Implanted SiC-Crystals
    • 4 with the Oxidation of Sodium-Implanted SiC-Crystals," Corros. Sci., 33 [4] 569-80 (1992).
    • (1992) Corros. Sci. , vol.33 , Issue.4 , pp. 569-580
    • Zheng, Z.1    Tressler, R.E.2    Spear, K.E.3
  • 28
    • 84987299792 scopus 로고
    • Oxidation Behavior of Chemically Vapor-Deposited Silicon Carbide
    • G. H. Shiroky, "Oxidation Behavior of Chemically Vapor-Deposited Silicon Carbide," Adv. Ceram. Mater., 2 [2] 137-41 (1987).
    • (1987) Adv. Ceram. Mater. , vol.2 , Issue.2 , pp. 137-141
    • Shiroky, G.H.1
  • 29
    • 84986399706 scopus 로고
    • Oxidation of Chemically Vapor-Deposited Silicon Nitride in Dry Oxygen at 1923 to 2003
    • T. Narushima, R. Y. Lin, Y. Iguchi, and T. Hirai, "Oxidation of Chemically Vapor-Deposited Silicon Nitride in Dry Oxygen at 1923 to 2003," J. Am. Ceram. Soc., 76 [4] 1047-51 (1993).
    • (1993) J. Am. Ceram. Soc. , vol.76 , Issue.4 , pp. 1047-1051
    • Narushima, T.1    Lin, R.Y.2    Iguchi, Y.3    Hirai, T.4
  • 30
    • 0030868046 scopus 로고    scopus 로고
    • Paralinear Oxidation of CVD SiC in Water Vapor
    • E. J. Opila and R. E. Hann, "Paralinear Oxidation of CVD SiC in Water Vapor," J. Am. Ceram. Soc., 80 [1] 197-205 (1997).
    • (1997) J. Am. Ceram. Soc. , vol.80 , Issue.1 , pp. 197-205
    • Opila, E.J.1    Hann, R.E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.