High-temperature oxidation of silicon carbide and silicon nitride

Materials Transactions, JIM

Volumn 38, Issue 10, 1997, Pages 821-835

  Narushima, T ^a   Goto, T ^b   Hirai, T ^b   Iguchi, Y ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Active oxidation; High temperature; Oxidation; Passive oxidation; Silica; Silicon carbide; Silicon nitride; Silicon based ceramics; Transition

Indexed keywords

CRYSTAL MICROSTRUCTURE; MATHEMATICAL MODELS; OXIDATION; PHASE TRANSITIONS; PRESSURE EFFECTS; REACTION KINETICS; SILICON CARBIDE; SILICON NITRIDE; THERMODYNAMICS;

ACTIVE TO PASSIVE TRANSITION; VOLATILITY DIAGRAM; WAGNER MODEL;

CERAMIC MATERIALS;

EID: 0031249110     PISSN: 09161821     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans1989.38.821     Document Type: Review

References (143)

1. K. Komeya: Bull. Ceram. Soc. Jpn., 25 (1990), 35.
2. R. W. Ohnsorg and M. O. Ten Eyck: Silicon Carbide 1987, Ed. by J. D. Cawley and C. E. Semier, Am. Ceram. Soc., Westerville, OH, (1989), p. 367.
3. Y. Naruse and T. Hatta: Bull. Ceram. Soc. Jpn., 18 (1983), 42.
4. S. Y. Dapkunas: Ceramic Bull., 67 (1988), 388.
5. J. W. MacBeth: Ceramic Bull., 71 (1992), 174.
6. H. Kinugasa: Bull. Ceram. Soc. Jpn., 18 (1983), 47.
7. H. Ohno: Bull. Ceram. Soc. Jpn., 23 (1988), 656.
8. J. Chin and T. Ohkawa: Nucl. Tech., 32 (1977), 115.
9. T. Iseki: Bull. Ceram. Soc. Jpn., 21 (1986), 510.
10. Y. Hirohata, M. Kobayashi, S. Maeda, K. Nakamura, M. Mohri, K. Watanabe and T. Yamashita: Thin Solid Films, 63 (1979), 237.
11. R. A. L. Drew: Can. Metall. Qurt., 27 (1988), 59.
12. K. Koga: Bull. Ceram. Soc. Jpn., 25 (1990), 107.
13. M. Sasaki: Bull. Ceram. Soc. Jpn., 25 (1990), 225.
14. O. Kamigaito: Bull. Ceram. Soc. Jpn., 25 (1990), 225.
15. N. N. Ault: Ceram. Bull., 70 (1991), 882.
16. T. Itoh: Bull. Ceram. Soc. Jpn., 23 (1988), 638.
17. Y. Hattori: Kinou Zairyo 1989, No. 8 (1989), 32.
18. Am. Ceram. Soc. Bull., 65 (1986), 342-376.
19. Am. Ceram. Soc. Bull., 66 (1987), 330-352.
20. A. K. Misra: J. Mat. Sci., 26 (1991), 6591.
21. M. Backhaus-Ricoult: J. Am. Ceram. Soc., 74 (1991), 1793.
22. K. W. White and L. Gauzzone: J. Am. Ceram. Soc., 74 (1991), 2280.
23. M. Sasaki: Ph.D Thesis, Tohoku Univ., (1991).
24. W. v. Munch and P. Hoeck: Solid State Electron., 21 (1978), 479.
25. S. Nishino, A. Ibaraki, H. Matsunami and T. Tanaka: Jpn. J. Appl. Phys., 19 (1980), 353.
26. S. Nishino, J. A. Powell and H. A. Will: Appl. Phys. Lett., 42 (1983), 460.
27. K. Shibahara, S. Nishino and M. Matsunami: Jpn. J. Appl. Phys., 23 (1984), 862.
28. S. Yoshida, K. Sasai, E. Sakura, S. Misawa and S. Gonda: Appl. Phys. Lett., 46 (1985), 766.
29. S. Yoshida, H. Daimon, M. Yamanaka, E. Sakuma, S. Misawa and K. Endo: J. Appl. Phys., 60 (1986), 2989.
30. J. W. Palmour, H. S. Kong and R. F. Davis: Appl. Phys. Lett., 51 (1987), 2028.
31. M. Kuwagaki, K. Imai, T. Ogino and Y. Amemiya: Jpn. J. Appl. Phys., 28 (1989), 173.
32. M. Shinohara, M. Yamanaka, S. Misawa, H. Okumura and S. Yoshida: Jpn. J. Appl. Phys., 30 (1991), 240.
33. T. Yoshimi and H. Katoh: Bull. Ceram. Soc. Jpn., 20 (1985), 280.
34. S. C. Singhal: Ceram. Int., 2 (1976), 123.
35. S. C. Singhal: Properties of High Temperature Alloys. Ed. by Z. A. Foroulis and F. S. Pettit, The Electrochem. Soc., Princeton, NJ, (1976), p. 697.
36. A. C. Lea: J. Soc. Glass Technol., 33 (1949), 27.
37. G. Ervin, Jr.: J. Am. Ceram. Soc., 41 (1958), 347.
38. H. Suzuki: J. Ceram. Soc. Jpn., 67 (1959), 157.
39. P. J. Jorgensen, M. E. Wadsworth and I. B. Cutler: J. Am. Ceram. Soc., 43 (1960), 209.
40. J. Schlichting: Ber. Dt. Keram. Soc., 56 (1979), 196.
41. J. Schlichting: Ber. Dt. Keram. Soc., 56 (1979), 256.
42. N. S. Jacobson: J. Am. Ceram. Soc., 76 (1993), 3.
43. O. Kubaschewski and C. B. Alcock: Metallurgical Thermochemistry 5th ed., Pergamon Press, New York, (1979), p. 378.
44. H. E. Kim and A. J. Moorhead: J. Am. Ceram. Soc., 73 (1990), 1868.
45. H. E. Kim and A. J. Moorhead: J. Am. Ceram. Soc., 73 (1990), 3007.
46. C. Wagner: J. Appl. Phys., 29 (1958), 1295.
47. E. T. Turkdogan, P. Grievson and L. S. Darken: J. Phys. Chem., 67 (1963), 1647.
48. K. G. Nickel: J. Euro. Ceram. Soc., 9 (1992), 3.
49. O. Kubaschewski and C. B. Alcock: Metallurgical Thermochemistry 5th ed., Pergamon Press, New York, (1979), p. 221.
50. T. Rosenqvist and J. KR. Tuset: Metall. Trans. B, 18B (1987), 471.
51. V. L. K. Lou and T. E. Mitchell and A. H. Heuer: J. Am. Ceram. Soc., 68 (1985), 49.
52. V. L. K. Lou and A. H. Heuer: High Temperature Corrosion of Technical Ceramics, Ed. by R. J. Fordham. Elsevier Applied Science, England, (1990), 33.
53. A. H. Heuer and V. L. K. Lou: J. Am. Ceram. Soc., 73 (1990), 2789.
54. G. Eriksson and K. Hack: Metall. Trans. B, 21B (1990), 1013.
55. T. Narushima, T. Goto, Y. Iguchi and T. Hirai: J. Am. Ceram. Soc., 74 (1991), 2583.
56. T. Narushima, T. Goto, Y. Yokoyama, J. Hagiwara, Y. Iguchi and T. Hirai: J. Am. Ceram. Soc., 77 (1994), 2369.
57. T. Narushima, T. Goto, J. Hagiwara, Y. Iguchi and T. Hirai: J. Am. Ceram. Soc., 77 (1994), 2921.
58. E. A. Gulbransen, K. F. Andrew and F. A. Brassart, J. Electrochem. Soc., 113 (1966), 1311.
59. R. W. Bartlett, J. Electrochem. Soc., 118 (1971), 397.
60. R. C. A. Harris and R. L. Call: Silicon Carbide 1973, Ed. by R. C. Marchall, J. W. Faust, Jr. and C. E. Ryan. University of South Carolina Press, Columbia, SC, (1974), p. 329.
61. R. Kossowski and S. C. Singhal: Grain Boundary in Engineering Materials, Ed. by J. J. Walter, J. H. Westbrook and D. A. Woodford, Baton Rouge, NY, (1975), p. 257.
62. J. A. Costello and R. E. Tressler: J. Am. Ceram. Soc., 69 (1986), 674.
63. T. Narushima, T. Goto and T. Hirai: J. Am. Ceram. Soc., 72 (1989), 1386.
64. Z. Zheng, R. E. Tressler and K. E. Spear: J. Electrochem. Soc., 137 (1990), 854.
65. F. Sibieude, J. Rodriguez and M. T. Clavaguera-mora: Thin Solid Films, 204 (1991), 217.
66. T. Narushima, R. Y. Lin, Y. Iguchi and T. Hirai: J. Am. Ceram. Soc., 76 (1993), 1047.
67. G. Q. Weaver and B. A. Olson: Silicon Carbide 1973, Ed. by R. C. Marchall, J. W. Faust, Jr. and C. E. Ryan, University of South Carolina Press, Columbia, SC, (1974), p. 367.
68. S. C. Singhal: J. Am. Ceram. Soc., 59 (1976), 81.
69. A. Suzuki, H. Ashida, N. Furui, K. Mameno and H. Matsunami: Jpn. J. Appl. Phys., 21 (1982), 579.
70. W. J. Lu, A. J. Steckl, T. P. Chow and W. Katz: J. Electrochem. Soc., 131 (1984), 1907.
71. C. D. Fung and J. J. Kopanski: Appl. Phys. Lett., 45 (1984), 757.
72. R. E. Tressler, J. A. Costello and Z. Zheng: Industrial Heat Exchangers, Ed. by Dr. Hayes et al., Am. Soc. Metals, (1985), p. 307.
73. M. Maeda, K. Nakamura and T. Ohkubo: J. Mat. Sci., 23 (1988), 3933.
74. T. Narushima, T. Goto, Y. Iguchi and T. Hirai: J. Am. Ceram. Soc., 73 (1990), 3580.
75. E. J. Opila: J. Am. Ceram. Soc., 77 (1994), 730.
76. D. E. Rosner and H. D. Allendorf: J. Phys. Chem., 74 (1970), 1829.
77. J. E. Antill and J. B. Warburton: Corr. Sci., 11 (1971), 337.
78. V. I. Elchin, B. V. Lukin, A. E. Rautbout, A. I. Rekov, V. E. Serebrennikova, I. A. Yovorskii, G. E. Val'yano and M. D. Malanov: Izvest. Akad. Nauk. SSSR, Neorgan. Mater., 7 (1971), 1342.
79. M. J. Bennett and G. H. Chaffey: J. Nucl. Mat., 52 (1974), 184.
80. J. W. Hinze and H. C. Graham: J. Electrochem. Soc., 123 (1976), 1066.
81. H. E. Kim and D. W. Readey: Silicon Carbide 1987, Ed. by J. D. Cawley and C. E. Semier, Am. Ceram. Soc., Westerville, OH, (1989), p. 301.
82. W. L. Vaughn and H. G. Maahs: J. Am. Ceram. Soc., 73 (1990), 1540.
83. N. S. Jacobson, A. J. Eckel, A. K. Misra and D. L. Humphrey: J. Am. Ceram. Soc., 73 (1990), 2330.
84. D. P. Butt, R. E. Tressler and K. E. Spear: J. Am. Ceram. Soc., 74 (1991), 457.
85. M. Balat, G. Flamant, G. Male and G. Pichelin: J. Mat. Sci., 27 (1992), 697.
86. D. P. Butt, R. E. Tressler and K. E. Spear: J. Am. Ceram. Soc., 75 (1992), 3257.
87. T. Narushima, T. Goto, Y. Yokoyama, Y. Iguchi and T. Hirai: J. Am. Ceram. Soc., 76 (1993), 1047.
88. T. Narushima, T. Goto, Y. Yokoyama, M. Takeuchi, Y. Iguchi and T. Hirai: J. Am. Ceram. Soc., 77 (1994), 1079.
89. E. M. Levin, C. R. Robbins and H. F. McMurdie, Phase Diagram for Ceramists, 1069 Supplement, The Am. Ceram. Soc., Columbus, OH, (1969), p. 76.
90. S. C. Singhal and F. F. Lange: J. Am. Ceram. Soc., 58 (1975), 433.
91. J. W. Hinze, W. C. Tripp and H. C. Graham: Mass Transport Phenomena in Ceramics, Ed. by A. R. Cooper and A. H. Heuer, Plenum Publ., NY, (1975), 409.
92. S. C. Singhal: J. Mat. Sci., 11 (1976), 1246.
93. J. Schlichting and K. Schwetz: High Temp. High Press., 14 (1982), 219.
94. I. A. Aksay and J. A. Pask: J. Am. Ceram. Soc., 58 (1975), 507.
95. N. G. Ainslie, C. R. Morelock and D. Turnbull: Symposium on Nucleation and Crystallization in Glasses and Melts, Ed. by M. K. Reser, G. Smith and H. Insley., The Am. Ceram. Soc., Columbus, OH, (1962), p. 97.
96. W. D. Kingary: Introduction to Ceramics, Wiley & Sons, NY, (1960), p. 137.
97. L. U. Ogbuji: J. Mat. Sci., 16 (1981), 2753.
98. A. H. Heuer, L. U. Ogbuji and T. E. Mitchell: J. Am. Ceram. Soc., 63 (1980), 354.
99. J. A. Costello and R. E. Tressler: J. Am. Ceram. Soc., 64 (1981), 327.
100. K. L. Luthra: J. Am. Ceram. Soc., 74 (1991), 1095.
101. G. H. Schiroky: Ad. Ceram. Mat., 2 (1987), 137.
102. A. J. Moulson and J. P. Roberts: Trans. Faraday Soc., 57 (1961), 1208.
103. S. Rigo, F. Rochet, A. Agius and A. Straboni: J. Electrochem. Soc., 129 (1982), 867.
104. S. Ban-ya, Y. Iguchi and S. Yamamoto: Tetsu-to-Hagané, 72 (1986), 2210.
105. H. Cappelen, K. H. Johansen and K. Motzfeldt: Acta Chemica Scand., A 35 (1981), 247.
106. E. A. Irene and R. Ghez: J. Electrochem. Soc., 124 (1977), 1757.
107. F. E. Wagstaff, S. D. Brown and I. B. Cutler: Phys. Chem. Glass., 5 (1964), 76.
108. F. E. Wagstaff and K. J. Richards: J. Am. Ceram. Soc., 49 (1966), 118.
109. I. Franz and W. Langheinrich: Solid-State Electron., 14 (1971), 499.
110. J. H. Rosolowski and C. D. Greskovich: Semi-Annual Tech. Rept., ARPA Order No. 2698, Program No. 4D10, Advanced Research Projects Agency, Office of Naval Research, Arlington, Virginia, Oct. (1974).
111. H. Mellottee, G. Cochet and R. Delbourgo: Revue de Chimie Minerale, 13 (1976), 373.
112. T. Enomoto, R. Ando, H. Morita and H. Nakayama: Jpn. J. Appl. Phys., 17 (1978), 1049.
113. F. S. Galasso, R. D. Veltri and W. J. Croft: Am. Ceram. Soc. Bull., 57 (1978), 453.
114. T. Hirai, K. Niihara and T. Goto: J. Am. Ceram. Soc., 63 (1980), 419.
115. L. V. Chramova, T. P. Smirnova, B. M. Ayupov and V. I. Belyi: Thin Solid Films, 78 (1981), 303.
116. H. Du, R. E. Tressler, K. E. Spear and C. G. Pantano: J. Electrochem. Soc., 136 (1989), 1527.
117. D. J. Choi, D. B. Fischbach and W. D. Scott: J. Am. Ceram. Soc., 72 (1989), 1118.
118. J. B. Warburton, J. E. Antill and W. M. Hawes: J. Am. Ceram. Soc., 61 (1978), 67.
119. J. C-H. Hui, T-Y. Chiu, S-W. Wong and W. G. Oldman: IEEE Trans. Electron Devices, ED-29 (1982), 554.
120. T. Sato, K. Haryu, T. Endo and M. Shimada: J. Mater. Sci., 22 (1987), 2635.
121. A. E. T. Kuiper, M. F. C. Willemsen and J. M. L. Mulder: J. Vac. Sci. Technol., B7 (1989), 455.
122. M. Maeda, K. Nakamura and M. Yamada: J. Mater. Sci., 25 (1990), 3790.
123. A. Fourrier, A. Bosseboeuf, D. Bouchier and G. Gautherin: J. Electrochem. Soc., 138 (1991), 1084.
124. T. Narushima, Y. Iguchi, H. Tagawa, T. Hayashi, T. Goto and T. Hirai: Collected Abstracts of 1994 Spring Meeting of Japan Inst. Metals, p. 340.
125. W. C. Tripp and H. C. Graham: J. Am. Ceram. Soc., 59 (1976), 399.
126. J. E. Sheehan: J. Am. Ceram. Soc., 65 (1982), C111.
127. H. E. Kim: Ph.D Thesis, The Ohio State Univ., Columbus, OH, (1987).
128. H. Du: Ph.D Thesis, Pennsylvania State University, (1988).
129. S. C. Singhal: J. Mat. Sci., 11 (1976), 500.
130. D. Cubiccioti and K. H. Lau: J. Am. Ceram. Soc., 61 (1978), 512.
131. E. M. Levin, C. R. Robbins and H. F. McMurdie: Phase Diagram for Ceramists, 1969 Supplement, The Am. Ceram. Soc., Columbus, OH, (1969), p. 88 and p. 107.
132. J. Schlichting and J. Gauckler: Pow. Metall. Int., 9 (1977), 36.
133. D. M. Mieskowski and W. A. Sanders: J. Am. Ceram. Soc., 68 (1985), C160.
134. K. Yonezawa: Master Thesis, Tohoku University, (1985).
135. J. Schlichting: High Temp. High Press., 14 (1982), 717.
136. R. K. Brow and C. G. Pantano: J. Am. Ceram. Soc., 69 (1986), 314.
137. H. G. Maguire and P. D. Augustus: J. Electrochem. Soc., 119 (1972), 791.
138. S. I. Raider, R. Flitsch, J. A. Aboaf and W. A. Pliskin: J. Electrochem. Soc., 123 (1976), 560.
139. L. U. J. T. Ogbuji: J. Am. Ceram. Soc., 75 (1992), 2995.
140. L. U. T. Ogbuji and D. T. Jayne: J. Electrochem. Soc., 140 (1993), 759.
141. L. U. J. T. Ogbuji and J. L. Smialek: J. Electrochem. Soc., 138 (1991), L51.
142. H. D. Batha and E. D. Whitney: J. Am. Ceram. Soc., 56 (1973), 365.
143. T. Goto and T. Hirai: J. Mat. Sci., 22 (1987), 2842.