Three-dimensional thickness and property distribution of TiC films deposited by DC magnetron sputtering and HIPIMS

Surface and Coatings Technology

Volumn 250, Issue , 2014, Pages 37-43

  Balzer, Martin ^a   Fenker, Martin ^a  

^a Depart of Electrochemistry Research Institute for Precious Metals and Metal Chemistry Fem   (Germany)

Author keywords

Complex shaped substrate; HIPIMS; Magnetron sputtering; Off normal growth; Titanium carbide; Uniformity

Indexed keywords

DENSITY (SPECIFIC GRAVITY); DEPOSITION; EMISSION SPECTROSCOPY; HARDNESS; MAGNETRON SPUTTERING; MAGNETRONS; SCANNING ELECTRON MICROSCOPY; THICKNESS MEASUREMENT; THREE DIMENSIONAL;

DC MAGNETRON SPUTTERING; DIRECT CURRENT MAGNETRON SPUTTERING; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); HIPIMS; PEAK POWER DENSITIES; SUBSTRATE BIAS VOLTAGES; THREE-DIMENSIONAL STRUCTURE; UNIFORMITY;

TITANIUM CARBIDE;

EID: 84899973126     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2014.02.011     Document Type: Article

References (21)

1. Kouznetsov V., Macák K., Schneider J.M., Helmersson U., Petrov I. Surf. Coat. Technol. 1999, 122:2901.
2. Macak K., Kouznetsov V., Schneider J., Helmersson U., Petrov I. J. Vac. Sci. Technol. A 2000, 18:1533.
3. Ehiasarian A.P., Newa R., Münz W.D., Hultman L., Helmersson U., Kouznetsov V. Vacuum 2002, 65:147-154.
4. Gudmundsson J.T., Alami J., Helmersson U. Appl. Phys. Lett. 2001, 78:3427.
5. Bohlmark J., Alami J., Christou C., Ehiasarian A.P., Helmersson U. J. Vac. Sci. Technol. 2005, 23-1:18-22.
6. Samuelsson M., Lundin D., Jensen J., Raadu M.A., Gudmundsson J.T., Helmersson U. Surf. Coat. Technol. 2010, 205:591-596.
7. Alami J., Eklund P., Emmerlich J., Wilhelmsson O., Jansson U., Högberg H., Hultman L., Helmersson U. Thin Solid Films 2006, 515:1731-1736.
8. Lattemann M., Ehiasarian A.P., Bohlmark J., Persson P.Å.O., Helmersson U. Surf. Coat. Technol. 2006, 200:6495-6499.
9. Chistyakov R., Abraham B., Sproul W., Moore J., Lin J. SVC 50th Annual Technical Conf. Proc. 2007, 139-143.
10. Bobzin K., Bagcivan N., Immich P., Bolz S., Cremer R., Leyendecker T. Thin Solid Films 2008, 517:1251-1256.
11. Alami J., Persson P.Å.O., Music D., Gudmundsson J.T., Bohlmark J., Helmersson U. J. Vac. Sci. Technol. A 2005, 23:278-280.
12. Greczynski G., Bohlmark J., Pei V.T., Chen C.Q., De Hosson J.T.M., Alunovic M., Cremer R. SVC 51st Annual Technical Conf. Proc. 2008, 48.
13. Gudmundsson J.T. Vacuum 2010, 84:1360-1364.
14. Greczynski G., Jensen J., Hultman L. Thin Solid Films 2011, 519:6354-6361.
15. Elofsson V., Magnfält D., Samuelsson M., Sarakinos K. J. Appl. Phys. 2013, 113:174906.
16. DeKoven B.M., Ward P.R., Weiss R.E., Christie D.J., Scholl R.A., Sproul W.D., Tomasel F., Anders A. SVC 46th Annual Technical Conf. Proc. 2003, 158-165.
17. Garcia-Martin J.M., Alvarez R., Romero-Gomez P., Cebollarda A., Palmero A. Appl. Phys. Lett. 2010, 97:173103.
18. Konig H., Helwig G. Optik (Stuttgart) 1950, 6:111.
19. Alami J., Sarakinos K., Uslu F., Wuttig M. J. Phys. D. Appl. Phys. 2009, 42:015304.
20. http://en.wikipedia.org/wiki/Titanium_carbide.
21. 2 compound target by HIPIMS 2014, (manuscript in preparation, preliminary results report: "http://www.fem-online.de/balzer_stoichiometry_ti3sic2_hipims.pdf").