Electromechanical study of polyurethane films with carbon black nanoparticles for MEMS actuators

Journal of Micromechanics and Microengineering

Volumn 24, Issue 5, 2014, Pages

  Roussel, M ^a   Malhaire, C ^b   Deman, A L ^a   Chateaux, J F ^a   Petit, L ^c   Seveyrat, L ^c   Galineau, J ^c   Guiffard, B ^d   Seguineau, C ^e   Desmarres, J M ^e   Martegoutte, J ^e  

^a UNIVERSITÉ LYON 1   (France)

^b UNIVERSITÉ DE LYON   (France)

^c University de Lyon   (France)

^d IETR   (France)

^e CNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON BLACK; ELASTIC MODULI; GOLD COATINGS; GOLD DEPOSITS; MICROACTUATORS; NANOCOMPOSITES; NANOPARTICLES; PERMITTIVITY; POLYURETHANES;

CARBON BLACK NANOPARTICLES; CHARACTERIZATION METHODS; DIELECTRIC PERMITTIVITIES; FUNDAMENTAL RESONANCE FREQUENCY; MECHANICAL CHARACTERIZATIONS; NANO-COMPOSITE MEMBRANES; NANOINDENTATION EXPERIMENTS; POLYURETHANE MATRIX;

NANOCOMPOSITE FILMS;

EID: 84899584044     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/24/5/055011     Document Type: Article

References (27)

1. Bar-Cohen Y (ed) 2004 Electroactive Polymer (EAP) Actuators as Artificial Muscles: Reality, Potential, and Challenges vol PM136 (Bellingham, WA: SPIE Press) p 816
2. Shahinpoor M, Kim K J and Mojarrad M 2007 Artificial Muscles: Applications of Advanced Polymeric Nanocomposites (Boca Raton, FL: CRC Press, Taylor & Francis) p 387
3. O'Halloran A, O'Malley F and Mchugh P 2008 A review on dielectric elastomer actuators, technology, applications, and challenges J. Appl. Phys. 104 071101
4. Kornbluh R, Pelrine R, Prahlad H and Heydt R 2004 Electroactive polymers: an emerging technology for MEMS Proc. SPIE 5344 13-27
5. Kim B, Park Y D, Min K H, Lee J H, Hwang S S, Hong S M, Kim B H, Kim S O and Koo C M 2011 Electric actuation of nanostructured thermoplastic elastomer gels with ultralarge electrostriction coefficients Adv. Funct. Mater. 21 3242-9
6. Diaconu I, David A and Dorohoi D-O 2005 An experimental investigation of electroactive polyurethane J. Optoelectron. Adv. Mater. 7 2797-801
7. Guillot F M and Balizer E 2003 Electrostrictive effect in polyurethanes J. Appl. Polym. Sci. 89 399-404
8. Diaconu I and Dorohoi D 2005 Properties of polyurethane thin films J. Optoelectron. Adv. Mater. 7 921-4
9. Guiffard B, Guyomar D, Seveyrat L, Chowanek Y, Bechelany M, Cornu D and Miele P 2009 Enhanced electroactive properties of polyurethane films loaded with carbon-coated SiC nanowires J. Phys. D: Appl. Phys. 42 055503
10. Wongtimnoi K, Guiffard B, Bogner-Van De Moortèle A, Seveyrat L, Gauthier C and Cavaillé J-Y 2011 Improvement of electrostrictive properties of a polyether-based polyurethane elastomer filled with conductive carbon black Compos. Sci. Technol. 71 885-92
11. Rosset S, Niklaus M, Dubois P and Shea H R 2009 Metal Ion Implantation for the fabrication of stretchable electrodes on elastomers Adv. Funct. Mater. 19 470-8
12. Ouyang G, Wang K, Henriksen L, Akram M N and Chen X Y 2010 A novel tunable grating fabricated with viscoelastic polymer (PDMS) and conductive polymer (PEDOT) Sensors Actuators A 158 313-9
13. Pimpin A, Suzuki Y and Kasagi N 2007 Microelectrostrictive actuator with large out-of-plane deformation for flow-control application J. Microelectromech. Syst. 16 753-64
14. Oliver W C and Pharr G M 2004 J. Mater. Res. 19 3-20
15. Wongtimnoi K 2011 Polyuréthanes électrostrictifs et Nanocomposites: caractérisation et analyse des mécanismes de couplages électromécaniques PhD Dissertation INSA Lyon, France (2011-ISAL-0152)
16. Ignat M, Debove L and Josserond C 1996 Bull. SMFE 14 10-13
17. Malhaire C, Seguineau C, Ignat M, Josserond C, Debove L, Brida S, Desmarres J-M and Lafontan X 2009 Rev. Sci. Instrum. 80 10-13
18. Jozwik M, Delobelle P, Gorecki C, Meunier C, Munnik F, Nieradko L and Sabac A 2004 Thin Solid Films 468 84-92
19. Martins P, Delobelle P, Malhaire C, Brida S and Barbier D 2009 Eur. Phys. J. Appl. Phys. 45 10501
20. Park M-H, Jang W, Yang S-J, Shul Y and Han H 2006 Synthesis and characterization of new functional poly(urethane-imide) crosslinked networks J. Appl. Polym. Sci. 100 113-23
21. Bonnotte E, Delobelle P, Bornier L, Trolard B and Tribillon G 1997 Two interferometric methods for the mechanical characterisation of thin films by bulging test. Application to silicon single crystal J. Mater. Res. 12 2234-48
22. Maier-Schneider D, Maibach J and Obermeier E 1995 A new analytical solution for the load-deflection of square membranes J. Microelectromech. Syst. 4 238-41
23. Vlassak J J 1994 New experimental techniques and analysis methods for the study of the mechanical properties of materials in small volumes PhD dissertation Stanford University
24. Vlassak J J and Nix W D 1992 A new bulge test technique for the determination of the young's modulus and the Poisson's ratio of the thin films J. Mater. Res. 7 3242-9
25. Martins P, Delobelle P, Malhaire C, Brida S and Barbier D 2009 Bulge test and AFM point deflection method, two technics for the mechanical characterisation of very low stiffness freestanding films Eur. Phys. J. Appl. Phys. 45 10501
26. Galineau J, Guiffard B, Seveyrat L, Lallart M and Guyomar D 2013 Study and modeling of an electrostrictive polyurethane diaphragm loaded with conductive carbon black Sensors Actuators A 189 117-24
27. Lam T Y, Lau S T, Chao C, Chan H L W, Choy C L, Cheung W Y and Wong S P 2007 Characterization of proton irradiated copolymer thin films for microelectromechanical system applications Appl. Phys. Lett. 90 043511