Characterization of proton irradiated copolymer thin films for microelectromechanical system applications

Applied Physics Letters

Volumn 90, Issue 4, 2007, Pages

  Lam, T Y ^a   Lau, S T ^a   Chao, C ^a   Chan, H L W ^a   Choy, C L ^a   Cheung, W Y ^b   Wong, S P ^b  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COPOLYMERS; ELECTRODEPOSITION; MICROELECTROMECHANICAL DEVICES; PROTON IRRADIATION; SEMICONDUCTING SILICON;

COPOLYMER FILMS; ELECTROSTRICTIVE RESPONSE; LASER INTERFEROMETERY; SURFACE DISPLACEMENT;

THIN FILMS;

EID: 33846633777     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2435342     Document Type: Article

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