Experimental setup and realization of thin film specimens for microtensile tests

Review of Scientific Instruments

Volumn 80, Issue 2, 2009, Pages

  Malhaire, Christophe ^a   Seguineau, Ćdric ^b   Ignat, Michel ^b   Josserond, Charles ^b   Debove, Laurent ^b   Brida, Sebastiano ^c   Desmarres, Jean Michel ^d   Lafontan, Xavier ^e  

^a UNIVERSITÉ DE LYON   (France)

^b UNIV GRENOBLE ALPES   (France)

^c Auxitrol S A   (France)

^d CNES   (France)

^e 10 Av de l'Europe   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM BEAMS; CRITICAL PARAMETERS; ETCHING PROCESS; EXPERIMENTAL SET-UP; FINITE ELEMENT SIMULATIONS; LASER CUTTINGS; MICRO TENSILE TESTS; POLYMER SPECIMENS; RUPTURE STRESS; SILICON SUBSTRATES; STRESS/STRAIN CURVES; THICKNESS RATIOS; YOUNG'S MODULUS;

ALUMINA; LASER BEAM CUTTING; METAL CUTTING;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 61449127366     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3077153     Document Type: Article

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