Electroactive polymers: An emerging technology for MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5344, Issue , 2004, Pages 13-27

  Kornbluh, Roy ^a   Perline, Ron ^a   Prahlad, Harsha ^a   Heydt, Richard ^a  

^a SRI INTERNATIONAL   (United States)

Author keywords

Actuators; Artificial muscle; Dielectric elastomers; Electroactive polymers; MEMS; Micro optics; Microfluidics; Microrobots

Indexed keywords

ARTIFICIAL MUSCLES; DIELECTRIC ELASTOMERS; ELECTROACTIVE POLYMERS (EAP); MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); MICROFLUIDICS; MICROROBOTS;

DIELECTRIC MATERIALS; ELASTOMERS; ELECTROMAGNETISM; MICROACTUATORS; MICROOPTICS; MICROSENSORS; PIEZOELECTRICITY; PRODUCT DESIGN; SUBSTRATES; THERMAL EXPANSION; TRANSDUCERS;

MICROELECTROMECHANICAL DEVICES;

EID: 2142756958     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.538382     Document Type: Conference Paper

References (36)

1. th International Conf. on New Actuators, Bremen, Germany (June), pp. 371-378, 2002.
2. Bar-Cohen, Y., (ed.), Electroactive Polymer (EAP) Actuators as Artificial Muscles - Reality, Potential and Challenges, SPIE Press, Bellingham, Washington, 2001.
3. Wax, S., and R. Sands, "Electroactive polymer actuators and devices," in Smart Structures and Materials 1999: Electroactive Polymer Actuators and Devices (EAPAD), ed. Y. Bar-Cohen, Proc. SPIE 3669, pp. 2-10, 1999.
4. Krulevitch, P., A. Lee, P. Ramsey, J. Trevino, J. Hamilton, and M. Northrup, "Thin Film Shape Memory Alloy Microactuators", J. Microelectromech. Syst. 5:4, pp. 270-281, 1996.
5. Kornbluh, R., R. Pelrine, Q. Pei, R. Heydt, S. Stanford, S. Oh, and J. Eckerle, "Electroelastomers: applications of dielectric elastomer transducers for actuation, generation and smart structures," Smart Structures and Materials 2002: Industrial and Commercial Applications of Smart Structures Technologies, ed. A. McGowan, Proc. SPIE 4698, pp. 254-270, 2002.
6. Pelrine, R., P. Sommer-Larsen, R. Kornbluh, R. Heydt, G. Kofod, Q. Pei, and P. Gravesen. "Applications of Dielectric Elastomer Actuators," Smart Structures and Materials 2001: Electroactive Polymer Actuators and Devices, ed. Y. Bar-Cohen, Proc. SPIE, Vol. 4329, pp. 335-349, 2001.
7. Xia, F., H. Li, C. Huang, M. Huang, H. Xu, F. Bauer, Z. Cheng, and Q. Zhang, "Poly(vinylidene fluoride-trifluoroethylene) based high performance electroactive polymers," Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD), ed. Y. Bar-Cohen, Proc. SPIE 5051, pp. 133-142, 2003.
8. Baughman, R., L. Shacklette, R. Elsenbaumer, E. Pichta, and C. Becht, "Conducting polymer electromechanical actuators," Conjugated Polymeric Materials: Opportunities in Electronics, Optoelectronics and Molecular Electronics, eds. J. Bredas and R. Chance, Kluwer Academic Publishers, The Netherlands, pp. 559-582, 1990.
9. Shahinpoor, M., "Micro-electro-mechanics of ionic polymer gels as electrically controllable artificial muscles," J. Intelligent Material Systems and Structures 6, pp. 307-314, 1995.
10. Bobbio, S., M. Kellam, B. Dudley, S. Goodwin Johansson, S. Jones, J. Jacobson, F. Tranjan, and T. DuBois, "Integrated force arrays," Proc. IEEE Micro Electro Mechanical Systems Workshop, Fort Lauderdale, Florida, 1993.
11. Park, S., and T. Shrout, "Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals," J. Applied Physics 82, pp. 1804-1811, 1997.
12. Hunter, I. S. Lafontaine, J. Hollerbach, and P. Hunter, "Fast reversible NiTi fibers for use in microrobotics," Proc. 1991 IEEE Micro Electro Mechanical Systems - MEMS '91, Nara, Japan, pp. 166-170, 1991.
13. Tobushi, H., S. Hayashi, and S. Kojima, "Mechanical properties of shape memory polymer of polyurethane series," JSME International J., Series I, 35:3, 1992.
14. Hunter, I., and S. Lafontaine, "A comparison of muscle with artificial actuators," Tech. Digest of IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, pp. 178-185, 1992.
15. Kornbluh, R., R. Pelrine, Q. Pei, and V. Shastri, "Application of Dielectric EAP Actuators," Electroactive Polymer (EAP) Actuators as Artificial Muscles - Reality, Potential and Challenges, ed. Y. Bar-Cohen, SPIE Press, Bellingham, Washington, pp. 457-495, 2001.
16. Wingert, A., M. Lichter, S. Dubowsky, and M. Hafez, "Hyper-redundant robot manipulators actuated by optimized binary dielectric polymers," Smart Structures and Materials 2002: Electroactive Polymer Actuators and Devices (EAPAD), ed. Y. Bar-Cohen, Proc. SPIE. 4695, 2002.
17. Sommer-Larsen, P., J. Hooker, G. Kofod, K. West, M. Benslimane, and P. Gravesen, "Response of dielectric elastomer actuators," Smart Structures and Materials 2001: Electroactive Polymer Actuators and Devices, ed. Yoseph Bar-Cohen, Proc. SPIE 4329, pp. 157-163, 2001.
18. Jeon, J., K. Park, S. An, J. Nam, H. Choi, H. Kim, S. Bae, and Y. Tak, "Electrostrictive polymer actuators and their control systems," Smart Structures and Materials 2001: Electroactive Polymer Actuators and Devices, ed. Yoseph Bar-Cohen, Proc. SPIE 4329, (2001) pp. 380-388.
19. Pelrine, R., R. Kornbluh, Q. Pei, and J. Joseph, "High-Speed Electrically Actuated Elastomers with Over 100% Strain," Science 287:5454, pp. 836-839, 2000.
20. Pelrine, R., R. Kornbluh, and G. Kofod, "High-Strain Actuator Materials Based on Dielectric Elastomers," Advanced Materials 2000 12:16, pp. 1223-1225, 2000.
21. Pelrine, R., R. Kornbluh, J. Joseph, and J. Marlow, "Analysis of the Electrostriction of Polymer Dielectrics with Compliant Electrodes as a Means of Actuation," Sensors and Actuators A: Physical 64, pp. 77-85, 1998.
22. Kornbluh, R., R. Pelrine, Q. Pei, S. Oh, and J. Joseph, "Ultrahigh Strain Response of Field-Actuated Elastomeric Polymers," Proc. SPIE, Smart Structures and Materials 2000: Electroactive Polymer Actuators and Devices (EAPAD), Y. Bar-Cohen, ed., Proc. SPIE 3987, pp. 51-64, 2000.
23. Pelrine, R., R. Kornbluh, J. Eckerle, P. Jeuck, S. Oh, Q. Pei, and S. Stanford, "Dielectric Elastomers: Generator Mode Fundamentals and Applications," in Smart Structures and Materials 2001: Electroactive Polymer Actuators and Devices, ed. Y. Bar-Cohen, Proc. SPIE 4329, pp. 148-156, 2001.
24. Kornbluh, R., R. Pelrine, J. Joseph, R. Heydt, Q. Pei, and S. Chiba, "High-Field Electrostriction of Elastomeric Polymer Dielectrics for Actuation," Smart Structures and Materials 1999: Electroactive Polymer Actuators and Devices, ed. Y. Bar-Cohen, Proc. SPIE 3669, pp. 149-161, 1999.
25. Heydt, R. and S. Chhokar, "Refreshable Braille Display Based on Electroactive Polymers," to be published in Proc. 23rd Intl. Display Research Conf., Phoenix, Arizona, 15-18 September 2003.
26. Lacour, S., R. Pelrine, S. Wagner, and H. Prahlad. "Photoconductive High-Voltage Switches of Thin-Film Amorphous Silicon for EAP Actuators," Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices, ed. Y. Bar-Cohen, Proc. SPIE 5051, pp. 412-418, 2003.
27. Kornbluh, R., D. Flamm, H. Prahlad, K. Nashold, S. Chhokar, R. Pelrine, D. Huestis, J. Simons, T. Cooper, and D. Watters, "Shape control of large lightweight mirrors with dielectric elastomer actuation," Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD), ed. Y. Bar-Cohen, Proc. SPIE 5051, pp. 143-158, 2003.
28. Flynn, A., R. Brooks, and L. Tavrow, "Twightlights and Cornerstones: A Gnat Robot Double Feature," Massachusetts Institute of Technology Artificial intelligence Laboratory Memo 1126, 1989.
29. Kornbluh, R., R. Full, K. Meijer, R. Pelrine, and S. Shastri, "Engineering a Muscle: An Approach to Artificial Muscle Based on Field-Activated Electroactive Polymers," Neurotechnology for Biomimetic Robots, eds. J. Ayers, J. Davis, and A. Rudolph, MIT Press, pp. 137-172, 2002.
30. Pei, Q., S. Stanford, M. Rosenthal, R. Pelrine, R. Kornbluh, K. Meijer, and R. Full, "3-D Multifunctional Electroelastomer Actuators and Their Application for Biomimetic Walking Robots," Smart Structures and Materials 2002: Industrial and Commercial Applications of Smart Structures Technologies, ed. A. McGowan, Proc. SPIE, Vol. 4698, pp. 246-253, 2002.
31. Pei, Q., M. Rosenthal, R. Pelrine, S. Stanford, and R. Kornbluh, "Multifunctional electroelastomer actuators and their application for biomimetic walking robots," Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD), ed. Y. Bar-Cohen, Proc. SPIE 5051, pp. 281-290, 2003.
32. Walsh, S., "Microsystems, Micromachines and Optical Networks: The Second Wave," Micromachine Devices 6:1, pp. 4-6, 2001.
33. Bishop, D., C. Giles, and S. Das, "The Rise of Optical Switching," Scientific American, pp. 88-94, January 2001.
34. Akimoto, K., Y. Uenishil, K. Honma, and S. Nagaoka., "Evaluation of Comb-Drive Nickel Micromirror for Fiber Optical Communication," Proc. Tenth Annual International Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, Jan. 26-30, 1997, pp. 66-71.
35. Marxer, C., M.-A. Gretillat, N. de Rooij, R. Battig, O. Anthamatten, B. Valk, and P. Vogel, "Vertical Mirrors Fabricated by Reactive Ion Etching for Fiber Optical Switching Applications," Proc. Tenth Annual International Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, pp. 49-54, 1997.
36. Burns, D. and V. Bright, "Micro Electro Mechanical Variable Blaze Gratings," Proc. Tenth Annual International Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, pp. 55-60, 1997.