Injection compression molding of replica molds for nanoimprint lithography

Polymers

Volumn 6, Issue 3, 2014, Pages 604-612

  Nagato, Keisuke ^a,b  

^a UNIVERSITY OF TOKYO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Injection compression molding; Nanoimprint lithography; Replica mold

Indexed keywords

COMPRESSION MOLDING; FABRICATION; MOLDS;

BLU-RAY DISK; CYCLO-OLEFIN POLYMERS; FABRICATION METHOD; HIGH-THROUGHPUT; INJECTION COMPRESSION MOLDING; OPTICAL DISKS; PATTERNED MEDIAS; ULTRA-VIOLET;

NANOIMPRINT LITHOGRAPHY;

EID: 84899554887     PISSN: None     EISSN: 20734360     Source Type: Journal    
DOI: 10.3390/polym6030604     Document Type: Article

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