Implementation and analysis of polymeric microstructure replication by micro injection molding

Journal of Micromechanics and Microengineering

Volumn 14, Issue 3, 2004, Pages 415-422

  Su, Yu Chuan ^a,b   Shah, Jatan ^c   Lin, Liwei ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MASS REPLICATION; MICROFABRICATION;

COMPUTER SIMULATION; COSTS; ETCHING; INJECTION MOLDING; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; OPTIMIZATION; PROCESS CONTROL; SILICON WAFERS;

POLYMERS;

EID: 1642587798     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/3/015     Document Type: Article

References (19)

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