UV nanoimprint lithography with rigid polymer molds

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 661-664

  Gilles, Sandra ^a   Meier, Matthias ^a   Prömpers, Michael ^a   Hart, Andre van der ^a   Kügeler, Carsten ^a   Offenhäusser, Andreas ^a   Mayer, Dirk ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Hot embossing; Nanoimprint lithography; Plastomer; Polymer mold; UV NIL

Indexed keywords

HOT EMBOSSING; MOLD MATERIALS; NANOIMPRINT PROCESS; PLASTOMER; POLYMER MOLD; RIGID POLYMERS; SUB-50 NM; TRANSPARENT POLYMERS; UV-NANOIMPRINT LITHOGRAPHIES; UV-NIL;

MOLDS; POLYMERS;

NANOIMPRINT LITHOGRAPHY;

EID: 67349147030     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.051     Document Type: Article

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