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Volumn 44, Issue 11 PART 2, 2008, Pages 3450-3453
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Design of NI mold for discrete track media
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Author keywords
Discrete track media; Electron beam lithography; Hard disk drive; Line width roughness; Ni mold
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Indexed keywords
ELECTRON BEAM LITHOGRAPHY;
ELECTRON BEAMS;
HARD DISK STORAGE;
MOLDS;
NANOIMPRINT LITHOGRAPHY;
NICKEL;
SUBSTRATES;
DISCRETE TRACK MEDIA;
ELECTRON BEAM MASTERING;
ELECTROPLATING PROCESS;
HARD DISK DRIVE;
LINE EDGE ROUGHNESS;
LINEWIDTH ROUGHNESS;
NI MOLD;
SILICON SUBSTRATES;
ROUGHNESS MEASUREMENT;
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EID: 69949123082
PISSN: 00189464
EISSN: None
Source Type: Journal
DOI: 10.1109/TMAG.2008.2002414 Document Type: Article |
Times cited : (7)
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References (6)
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