Solid state MEMS devices on flexible and semi-transparent silicon (100) platform

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2014, Pages 548-551

  Ahmed, Sally M ^a   Hussain, Aftab M ^a   Rojas, Jhonathan P ^a   Hussain, Muhammad Mustafa ^a  

^a KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Saudi Arabia)

Author keywords

Flexible electronics; Sacrificial layer; Structural layer; Thermal flexure actuator

Indexed keywords

CHEMICAL MECHANICAL POLISHING; FABRICATION; FLEXIBLE ELECTRONICS; SILICON; SILICON WAFERS; SURFACE MICROMACHINING;

BULK SILICON; MEMS THERMAL ACTUATORS; MEMSDEVICES; SACRIFICIAL LAYER; SEMI-TRANSPARENT; SILICON (100); STRUCTURAL LAYERS; THERMAL ACTUATOR;

MEMS;

EID: 84898985471     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2014.6765699     Document Type: Conference Paper

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