A cost-effective flexible MEMS technique for temperature sensing

Microelectronics Journal

Volumn 38, Issue 3, 2007, Pages 360-364

  Xiao, Suyan ^a   Che, Lufeng ^a   Li, Xinxin ^a   Wang, Yuelin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Flexible MEMS technology; Platinum thin film; Polyimide; Temperature sensing array

Indexed keywords

COST EFFECTIVENESS; MEMS; MICROFABRICATION; MICROMACHINING; POLYIMIDES; SILICON WAFERS;

FLEXIBLE MEMS TECHNOLOGY; PLATINUM THIN FILMS; TEMPERATURE SENSING ARRAYS; TEMPERATURE SENSITIVE MATERIALS;

TEMPERATURE SENSORS;

EID: 34147171421     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.01.022     Document Type: Article

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