Strained growth of aluminum-doped zinc oxide on flexible glass substrate and degradation studies under cyclic bending conditions

IEEE Transactions on Device and Materials Reliability

Volumn 14, Issue 1, 2014, Pages 121-126

  Peng, Chien Yi ^a   Dhakal, Tara P ^b   Garner, Sean M ^c   Cimo, Patrick ^c   Lu, Susan ^b   Westgate, Charles R ^b  

^a BINGHAMTON UNIVERSITY   (United States)

^b State University of New York   (United States)

^c Corning Inc ^*  (United States)

Author keywords

Aluminum doped zinc oxide (AZO); bending fatigue; degradation of TCO; flexible glass

Indexed keywords

ALUMINUM; BENDING (FORMING); CYCLIC LOADS; DESIGN OF EXPERIMENTS; FATIGUE TESTING; GLASS; SUBSTRATES; X RAY DIFFRACTION; ZINC OXIDE;

ALUMINUM-DOPED ZINC OXIDE; BENDING FATIGUE; BENDING FATIGUE TESTS; EXPERIMENTAL FACTORS; OPTICAL DEGRADATION; OPTICAL PERFORMANCE; RF-MAGNETRON SPUTTERING; X-RAY DIFFRACTION TECHNIQUES;

THIN FILMS;

EID: 84898415469     PISSN: 15304388     EISSN: 15582574     Source Type: Journal    
DOI: 10.1109/TDMR.2013.2293878     Document Type: Article

References (27)

1. T. Minami, "Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications," Thin Solid Films, vol. 516, no. 7, pp. 1314-1321, Feb. 2008. (Pubitemid 351172386)
2. P. Jackson, D. Hariskos, E. Lotter, S. Paetel, R. Wuerz, R. Menner, W. Wischmann, and M. Powalla, "New world record efficiency for Cu(In, Ga) Se2 thin-film solar cells beyond 20%," Progr. Photovoltaics Res. Appl., vol. 19, no. 7, pp. 894-897, Nov. 2011.
3. B. Shin, O. Gunawan, Y. Zhu, N. A. Bojarczuk, S. J. Chey, and S. Guha, "Thin film solar cell with 8.4% power conversion efficiency using an earth-abundant Cu2ZnSnS4 absorber," Progr. Photovoltaics Res. Appl., vol. 21, no. 1, pp. 72-76, Jan. 2013.
4. J. Nomoto, T. Hirano, T. Miyata, and T.Minami, "Preparation of Al-doped ZnO transparent electrodes suitable for thin-film solar cell applications by various types of magnetron sputtering depositions," Thin Solid Films, vol. 520, no. 5, pp. 1400-1406, Dec. 2011.
5. T. Minami, T. Miyata, and Y. Ohtani, "P-223L: Late-News poster: New techniques for producing AZO thin films suitable for ITO transparent electrode applications in LCDs," SID Symp. Dig. Tech. Papers, vol. 37, no. 1, pp. 470-473, Jun. 2006. (Pubitemid 47184015)
6. S. H. Park, J. B. Park, and P. K. Song, "Characteristics of Al-doped, Ga-doped and In-doped zinc-oxide films as transparent conducting electrodes in organic light-emitting diodes," Curr. Appl. Phys., vol. 10, no. 3, pp. S488-S490, May 2010.
7. C. Tseng, C. Huang, H. Chang, D. Chen, C. Chou, and C. Hsu, "Structural and optoelectronic properties of Al-doped zinc oxide films deposited on flexible substrates by radio frequency magnetron sputtering," Thin Solid Films, vol. 519, no. 22, pp. 7959-7965, Sep. 2011.
8. C. Guillen and J. Herrero, "High conductivity and transparent ZnO: Al films prepared at low temperature by DC and MF magnetron sputtering," Thin Solid Films, vol. 515, no. 2, pp. 640-643, Oct. 2006. (Pubitemid 44425332)
9. D. C. Look, D. Reynolds, C. Litton, R. Jones, D. Eason, and G. Cantwell, "Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy," Appl. Phys. Lett., vol. 81, no. 10, pp. 1830-1832, Sep. 2002.
10. H. Kim, J. Horwitz, S. Qadri, and D. Chrisey, "Epitaxial growth of Aldoped ZnO thin films grown by pulsed laser deposition," Thin Solid Films, vol. 420/421, pp. 107-111, Dec. 2002. (Pubitemid 35465862)
11. J. Kim, S. Lee, J. S. Bae, S. Park, U. Choi, and C. Cho, "Electric properties and surface characterization of transparent Al-doped ZnO thin films prepared by pulsed laser deposition," Thin Solid Films, vol. 516, no. 16, pp. 5223-5226, Jun. 2008. (Pubitemid 351707422)
12. D. R. Sahu, S. Lin, and J. Huang, "Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation," Thin Solid Films, vol. 516, no. 15, pp. 4728-4732, Jun. 2008. (Pubitemid 351601800)
13. W. Tsang, F. Wong, M. Fung, J. Chang, C. Lee, and S. Lee, "Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment," Thin Solid Films, vol. 517, no. 2, pp. 891-895, Nov. 2008.
14. S. Grego, J. Lewis, E. Vick, and D. Temple, "A method to evaluate mechanical performance of thin transparent films for flexible displays," Thin Solid Films, vol. 515, no. 11, pp. 4745-4752, Apr. 2007. (Pubitemid 46282006)
15. Y. Leterrier, L. Medico, F. Demarco, J. Månson, U. Betz, M. Kharrazi Olsson, and F. Atamny, "Mechanical integrity of transparent conductive oxide films for flexible polymer-based displays," Thin Solid Films, vol. 460, no. 1/2, pp. 156-166, Jul. 2004.
16. C. Peng, M. Hamasha, D. VanHart, S. Lu, and C. Westgate, "Electrical and optical degradation studies on AZO thin films under cyclic bending conditions," IEEE Trans. Device Mater. Rel., vol. 13, no. 1, pp. 236-244, Mar. 2013.
17. K. Alzoubi, M. Hamasha, S. Lu, and B. Sammakia, "Bending fatigue study of sputtered ITO on flexible substrate," J. Display Technol., vol. 7, no. 11, pp. 593-600, Nov. 2011.
18. M. Hamasha, K. Alzoubi, S. Lu, and S. B. Desu, "Durability study on sputtered indium tin oxide thin film on poly ethylene terephthalate substrate," Thin Solid Films, vol. 519, no. 18, pp. 6033-6038, Jul. 2011.
19. M. Hamasha, K. Alzoubi, and S. Lu, "Behavior of sputtered indium-tin-oxide thin film on poly-ethylene terephthalate substrate under stretching," J. Display Technol., vol. 7, no. 8, pp. 426-433, Aug. 2011.
20. T. Minami, H. Sato, H. Nanto, and S. Takata, "Heat treatment in hydrogen gas and plasma for transparent conducting oxide films such as ZnO, SnO2 and indium tin oxide," Thin Solid Films, vol. 176, no. 2, pp. 277-282, Sep. 1989. (Pubitemid 20609701)
21. M. Hamasha, T. Dhakal, K. Alzoubi, S. Albahri, A. Qasaimeh, S. Lu, and C.Westgate, "Stability of ITO thin film on flexible substrate under thermal aging and thermal cycling conditions," J. Display Technol., vol. 8, no. 7, pp. 385-390, Jul. 2012.
22. T. Dhakal, M. Hamasha, A. Nandur, D. Vanhart, P. Vasekar, S. Lu, A. Sharma, and C.Westgate, "Moisture-induced surface corrosion in AZO thin films formed by atomic layer deposition," IEEE Trans. Device Mater. Rel., vol. 12, no. 2, pp. 347-356, Jun. 2012.
23. M. Hamasha, T. Dhakal, P. Vasekar, K. Alzoubi, S. Lu, D. Vanhart, and C.Westgate, "Reliability of sputter deposited aluminum-doped zinc oxide under harsh environmental conditions," Sol. Energy, vol. 89, pp. 54-61, Mar. 2013.
24. D. Garcia, F. Castaño, C. Prados, M. Vázquez, and F. Castano, "Crossed anisotropies in FeB/CoSiB bilayers induced by the bowed-substrate sputtering technique," Appl. Phys. Lett., vol. 74, no. 1, pp. 105-107, Jan. 1999. (Pubitemid 129709980)
25. A. Asenjo, D. García, J. García, C. Prados, and M. Vázquez, "Magnetic force microscopy study of dense stripe domains in Fe-B/Co-Si-B multilayers and the evolution under an external applied field," Phys. Rev. B, Condens. Matter, vol. 62, no. 10, pp. 6538-6544, Sep. 2000. (Pubitemid 32336034)
26. B. Peng, W. Zhang, Q. Xie, H. Jiang, W. Zhang, and Y. Li, "Study on the magnetic domain and anisotropy of FeCoSiB amorphous films fabricated by strained growth method," J. Magn. Magn. Mater., vol. 318, no. 1/2, pp. 14-17, Nov. 2007. (Pubitemid 47187563)
27. M. Ali, "Growth and study of magnetostrictive FeSiBC thin films for device applications," Ph.D. dissertation, Dept. Phys. Astron., Univ. Sheffield, Sheffield, U.K., 1999.