Local work function measurements of plasma-fluorinated epitaxial graphene

Applied Physics Letters

Volumn 104, Issue 8, 2014, Pages

  Sherpa, Sonam D ^a   Kunc, Jan ^b   Hu, Yike ^b   Levitin, Galit ^a   De Heer, Walt A ^b   Berger, Claire ^b,c   Hess, Dennis W ^a  

^a Georgia Institute of Technology   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c LABORATOIRE DE CRISTALLOGRAPHIE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORINATION; GRAPHENE; HALOGENATION; SILICON CARBIDE; SURFACE TOPOGRAPHY; TOPOGRAPHY; WORK FUNCTION;

BIMODAL DISTRIBUTION; EPITAXIAL GRAPHENE; LOCAL WORK FUNCTION; PLASMA FLUORINATION; SCANNING KELVIN PROBE MICROSCOPY; SIGNIFICANT SURFACES; WORK FUNCTION DISTRIBUTIONS; WORK FUNCTION ENGINEERINGS;

DISTRIBUTION FUNCTIONS;

EID: 84896783397     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4866783     Document Type: Article

References (16)

1. S. D. Sherpa, S. A. Paniagua, G. Levitin, S. R. Marder, M. D. Williams, and D. W. Hess, J. Vac. Sci. Technol. B 30, 03D102 (2012). 10.1116/1.3688760
2. S. D. Sherpa, G. Levitin, and D. W. Hess, Appl. Phys. Lett. 101, 111602 (2012). 10.1063/1.4752443
3. T. Mallouk, B. L. Hawkins, M. P. Conrad, K. Zilm, G. E. Maciel, and N. Bartlett, Philos. Trans. R. Soc., A 314, 179 (1985). 10.1098/rsta.1985.0017
4. T. Filleter, K. V. Emtsev, T. Seyller, and R. Bennewitz, Appl. Phys. Lett. 93, 133117 (2008). 10.1063/1.2993341
5. C. Berger, Z. Song, T. Li, X. Li, A. Y. Ogbazghi, R. Feng, Z. Dai, A. N. Marchenkov, E. H. Conrad, P. N. First, and W. A. de Heer, J. Phys. Chem. B 108, 19912 (2004). 10.1021/jp040650f
6. C. Berger, Z. Song, X. Li, X. Wu, N. Brown, C. Naud, D. Mayou, T. Li, J. Hass, A. N. Marchenkov, E. H. Conrad, P. N. First, and W. A. de Heer, Science 312, 1191 (2006). 10.1126/science.1125925
7. W. A. de Heer, C. Berger, M. Ruan, M. Sprinkle, X. Li, Y. Hu, B. Zhang, J. Hankinson, and E. Conrad, Proc. Natl. Acad. Sci. U.S.A. 108, 16900 (2011). 10.1073/pnas.1105113108
8. S. Sadewasser, T. Glatzel, M. Rusu, A. Jaüger-Waldau, and M. C. Lux-Steiner, Appl. Phys. Lett. 80, 2979 (2002). 10.1063/1.1471375
9. C. J. Chen, Introduction to Scanning Tunneling Microscopy (Oxford Science Publications, 2008).
10. C. Coletti, C. Riedl, D. S. Lee, B. Krauss, L. Patthey, K. von Klitzing, J. H. Smet, and U. Starke, Phys. Rev. B 81, 235401 (2010). 10.1103/PhysRevB.81. 235401
11. J. Hass, R. Feng, J. Millán-Otoya, X. Li, M. Sprinkle, P. N. First, W. A. de Heer, E. Conrad, and C. Berger, Phys. Rev. B 75, 214109 (2007). 10.1103/PhysRevB.75.214109
12. D. Sun, C. Divin, C. Berger, W. A. de Heer, P. N. First, and T. B. Norris, Phys. Rev. Lett. 104, 136802 (2010). 10.1103/PhysRevLett.104.136802
13. A. G. Nagy, J. Electrochem. Soc. 131, 1871 (1984). 10.1149/1.2115981
14. A. Perret, P. Chabert, J.-P. Booth, J. Jolly, J. Guillon, and P. Auvray, Appl. Phys. Lett. 83, 243 (2003). 10.1063/1.1592617
15. L. Sansonnens, A. Pletzer, D. Magni, A. A. Howling, C. Hollenstein, and J. P. M. Schmitt, Plasma Sources Sci. Technol. 6, 170 (1997). 10.1088/0963-0252/6/2/010
16. See supplementary material at http://dx.doi.org/10.1063/1.4866783 E-APPLAB-104-107408 for the description of how the roughness was calculated and Fig. 2 that shows the height histogram.