Deposition of yttria-stabilized zirconia thin films by high power impulse magnetron sputtering and pulsed magnetron sputtering

Surface and Coatings Technology

Volumn 240, Issue , 2014, Pages 1-6

  Sønderby, Steffen ^a,b   Aijaz, Asim ^a   Helmersson, Ulf ^a   Sarakinos, Kostas ^a   Eklund, Per ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b DANISH TECHNOLOGICAL INSTITUTE   (Denmark)

Author keywords

HiPIMS; HPPMS; Pulsed DCMS; SOFC; Substrate bias; YSZ

Indexed keywords

EID: 84894900131     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2013.12.001     Document Type: Article

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