-
1
-
-
0016569164
-
Sputtering - a Review of Some Recent Experimental and Theoretical Aspects
-
Oechsner, H., "Sputtering - a Review of Some Recent Experimental and Theoretical Aspects," Applied Physics, Vol. 8, 1973, pp. 185-198.
-
(1973)
Applied Physics
, vol.8
, pp. 185-198
-
-
Oechsner, H.1
-
2
-
-
0003606901
-
-
Sputtering by Particle Bombardment 1, Edited by R. Behrisch, Springer-Verlag, New York
-
Sputtering by Particle Bombardment 1. Physical Sputtering of Single Element Solids, Edited by R. Behrisch, Springer-Verlag, New York, 1981.
-
(1981)
Physical Sputtering of Single Element Solids
-
-
-
4
-
-
0030096316
-
Energy Dependence of Ion-Induced Sputtering Yields From Monatomic Solids at Normal Incidence
-
Yamamura, Y. and Tawara, H., "Energy Dependence of Ion-Induced Sputtering Yields From Monatomic Solids at Normal Incidence," Atomic Data and Nuclear Data Tables, Vol. 62, 1996, pp. 149-253.
-
(1996)
Atomic Data and Nuclear Data Tables
, vol.62
, pp. 149-253
-
-
Yamamura, Y.1
Tawara, H.2
-
5
-
-
0000784758
-
Sputtering Yields for Low Energy He+, Kr+, and Xe+ Ion Bombardment
-
Rosenberg, D. and Wehner, G.K., "Sputtering Yields for Low Energy He+, Kr+, and Xe+ Ion Bombardment," Journal of Applied Physics, Vol. 33, 1962, pp. 1842-1845.
-
(1962)
Journal of Applied Physics
, vol.33
, pp. 1842-1845
-
-
Rosenberg, D.1
Wehner, G.K.2
-
6
-
-
11544305273
-
-
AIAA Paper 96-2709 July
-
Pencil, E.J., Randolph, T., and Manzella, D.H., "End-of-Life Stationary Plasma Thruster Far-Field Plume Characterization," AIAA Paper 96-2709, July 1996.
-
(1996)
End-of-Life Stationary Plasma Thruster Far-Field Plume Characterization
-
-
Pencil, E.J.1
Randolph, T.2
Manzella, D.H.3
-
7
-
-
0001726725
-
Pure Element Sputtering Yield Data
-
edited by D. Briggs and M.P. Seah, Wiley, New York
-
Chambers, G.P. and Fine, J., "Pure Element Sputtering Yield Data," in Practical Surface Analysis: Ion and Neutral Spectroscopy, edited by D. Briggs and M.P. Seah, Wiley, New York, 1992, p. 705.
-
(1992)
Practical Surface Analysis: Ion and Neutral Spectroscopy
, pp. 705
-
-
Chambers, G.P.1
Fine, J.2
-
8
-
-
0025405040
-
Sputtering and Surface Topography of Oxides
-
Nenadovic, T., Peraillon, B., Bogdanov, Z., Djordjevic, Z., and Milic, M., "Sputtering and Surface Topography of Oxides," Nuclear Instruments and Methods in Physics Research, Vol. B48, 1990, pp. 538-543.
-
(1990)
Nuclear Instruments and Methods In Physics Research
, vol.B48
, pp. 538-543
-
-
Nenadovic, T.1
Peraillon, B.2
Bogdanov, Z.3
Djordjevic, Z.4
Milic, M.5
-
9
-
-
0024017752
-
Ion Beam Sputtering of Silicate Glasses and Oxides
-
Bach, H., "Ion Beam Sputtering of Silicate Glasses and Oxides," Journal of Non-Crystalline Solids, Vol. 102, 1988, pp. 36-42.
-
(1988)
Journal of Non-Crystalline Solids
, vol.102
, pp. 36-42
-
-
Bach, H.1
-
10
-
-
0022285831
-
Laboratory Studies of Kapton Degradation in an Oxygen Ion Beam
-
Ferguson, D.C., "Laboratory Studies of Kapton Degradation in an Oxygen Ion Beam," NASA Conference Publication, No. 2359, 1985, pp. 81-90.
-
(1985)
NASA Conference Publication
, vol.2359
, pp. 81-90
-
-
Ferguson, D.C.1
-
11
-
-
0023409967
-
A Semidynamic Study of Polymer Surface Morphology Development in Kapton-H Sputter Etched by 6 keV Xenon Atoms
-
Michael, R. and Stulik, D., "A Semidynamic Study of Polymer Surface Morphology Development in Kapton-H Sputter Etched by 6 keV Xenon Atoms," Nuclear Instruments and Methods in Physics Research, Vol. B28, 1987, pp. 259-263.
-
(1987)
Nuclear Instruments and Methods In Physics Research
, vol.B28
, pp. 259-263
-
-
Michael, R.1
Stulik, D.2
-
12
-
-
85088180909
-
-
AIAA Paper 2000-3521, July
-
Fife, J.M., Hargus, W.A., Jaworske, D.A., Jankovsky, R., Mason, L., Sarmiento, C., Snyder, J.S., Malone, S. Haas, J., and Gallimore, A.D., "Spacecraft Interaction Test Results of the High Performance Hall System SPT-140," AIAA Paper 2000-3521, July 2000.
-
(2000)
Spacecraft Interaction Test Results of the High Performance Hall System SPT-140
-
-
Fife, J.M.1
Hargus, W.A.2
Jaworske, D.A.3
Jankovsky, R.4
Mason, L.5
Sarmiento, C.6
Snyder, J.S.7
Malone, S.8
Haas, J.9
Gallimore, A.D.10
-
13
-
-
0021376484
-
An Empirial Formula for Angular Dependence of Sputtering Yields
-
Yamamura, Y., "An Empirial Formula for Angular Dependence of Sputtering Yields," Radiation Effects, Vol. 80, 1984, pp. 57-72.
-
(1984)
Radiation Effects
, vol.80
, pp. 57-72
-
-
Yamamura, Y.1
-
14
-
-
0018505626
-
Sputtering Yields for Light Ions as a Function of Angle of Incidence
-
Bohdansky
-
Bay, H.L. and Bohdansky, "Sputtering Yields for Light Ions as a Function of Angle of Incidence," Journal of Applied Physics, Vol. 19, 1979, pp. 421-426.
-
(1979)
Journal of Applied Physics
, vol.19
, pp. 421-426
-
-
Bay, H.L.1
-
15
-
-
0020735168
-
Computer Studies of the Energy Spectra and Reflection Coefficients of Light Ions
-
Takeuchi, W. and Yamamura, Y., "Computer Studies of the Energy Spectra and Reflection Coefficients of Light Ions," Radiation Effects, Vol. 71, 1983, pp. 53-64.
-
(1983)
Radiation Effects
, vol.71
, pp. 53-64
-
-
Takeuchi, W.1
Yamamura, Y.2
-
16
-
-
77957324498
-
Physical Properties and Interrelationships of Metallic and Semimetallic Elements
-
edited by F. Seitz and D. Turnbull, Academic Press, New York
-
Gschneidner, K.A., "Physical Properties and Interrelationships of Metallic and Semimetallic Elements," in Solid State Physics: Advances in Research and Applications, edited by F. Seitz and D. Turnbull, Academic Press, New York, 1964, p. 276.
-
(1964)
Solid State Physics: Advances In Research and Applications
, pp. 276
-
-
Gschneidner, K.A.1
-
17
-
-
0022664320
-
Computer Simulations of Atomic Collisions in Solids with Special Emphasis on Sputtering
-
Andersen, H.H., "Computer Simulations of Atomic Collisions in Solids with Special Emphasis on Sputtering," Nuclear Instruments and Methods in Physics Research, Vol. B18, 1987, pp. 321-343.
-
(1987)
Nuclear Instruments and Methods In Physics Research
, vol.B18
, pp. 321-343
-
-
Andersen, H.H.1
-
18
-
-
84894322746
-
A Monte-Carlo Computer-Program for the Transport of Energetic Ions in Amorphous Targets
-
Vol. 174,1980, pp. 257269; Biersack, J.P. and Eckstein, W., Sputtering Studies With the Monte Carlo Program TRIM, Applied Physics A
-
Biersack, J.P. and Haggmark, L.G., "A Monte-Carlo Computer-Program for the Transport of Energetic Ions in Amorphous Targets," Nuclear Instruments and Methods in Physics Research, Vol. 174,1980, pp. 257269; Biersack, J.P. and Eckstein, W., "Sputtering Studies With the Monte Carlo Program TRIM," Applied Physics A, Vol. 34, 1984, pp. 73-94.
-
(1984)
Nuclear Instruments and Methods In Physics Research
, vol.34
, pp. 73-94
-
-
Biersack, J.P.1
Haggmark, L.G.2
-
19
-
-
33751107543
-
Computer Simulation of Atomic-Displacement Cascades in Solids in the Binary-Collision Approximation
-
Robinson, M.T., Torrens, I.M., "Computer Simulation of Atomic-Displacement Cascades in Solids in the Binary-Collision Approximation," Phys. Rev. B, Vol. 9, 1974, pp. 5008-5024.
-
(1974)
Phys. Rev. B
, vol.9
, pp. 5008-5024
-
-
Robinson, M.T.1
Torrens, I.M.2
-
20
-
-
0032099104
-
A Detailed Physical Model for Ion Implant Induced Damage in Silicon
-
Tian, S.Y., Morris, M.F., Morris, S.J., Obradovic, B., Wang, G., Tasch, A.F. and C.M., "A Detailed Physical Model for Ion Implant Induced Damage in Silicon," IEEE Transactions on Electronic Devices, Vol. 45, 1998, pp. 1226-1238.
-
(1998)
IEEE Transactions On Electronic Devices
, vol.45
, pp. 1226-1238
-
-
Tian, S.Y.1
Morris, M.F.2
Morris, S.J.3
Obradovic, B.4
Wang, G.5
Tasch, A.F.6
-
21
-
-
0031547906
-
Computer Simulation of Ion Sputtering of Polyatomic Multilayered Targets
-
Ber, B.J., Kharlamov, V.S., Kudrjavtsev, Yu.A., Merkulov, A.V., Trushin, Yu.V. and Zhurkin, E.E., "Computer Simulation of Ion Sputtering of Polyatomic Multilayered Targets," Nuclear Instruments and Methods in Physics Research B, Vol. 127/128, 1997, pp. 286-290.
-
(1997)
Nuclear Instruments and Methods In Physics Research B
, vol.127
, Issue.128
, pp. 286-290
-
-
Ber, B.J.1
Kharlamov, V.S.2
Kudrjavtsev, Y.A.3
Merkulov, A.V.4
Trushin, Y.V.5
Zhurkin, E.E.6
-
22
-
-
0016414211
-
Computer Studies of Low Energy Scattering in Crystalline and Amorphous Targets
-
For example Hou, M., and Robinson, M.T., "Computer Studies of Low Energy Scattering in Crystalline and Amorphous Targets," Nuclear Instruments and Methods in Physics Research, Vol. 132, 1976, pp. 641 645.
-
(1976)
Nuclear Instruments and Methods In Physics Research
, vol.132
, pp. 641
-
-
Hou, M.1
Robinson, M.T.2
-
23
-
-
84894305564
-
A Cryogenically Pumped Space Simulation Facility for Plume and Contamination Studies
-
Manhattan Beach, CA, March 16-18
-
Lutfy, F.M., Vargo, S.E., Muntz, E.P., Ketsdever, A.D., "A Cryogenically Pumped Space Simulation Facility for Plume and Contamination Studies," Proceedings of the 18th Aerospace Testing Seminar, Manhattan Beach, CA, March 16-18, 1999.
-
(1999)
Proceedings of the 18th Aerospace Testing Seminar
-
-
Lutfy, F.M.1
Vargo, S.E.2
Muntz, E.P.3
Ketsdever, A.D.4
-
24
-
-
0033522226
-
Coherent Displacement of Atoms During Ion Irradiation
-
Nordlund, K., Keinonen, J., Ghaly, M., Averback, R.S., "Coherent Displacement of Atoms During Ion Irradiation," Nature, Vol. 398, 1999, pp. 49-51.
-
(1999)
Nature
, vol.398
, pp. 49-51
-
-
Nordlund, K.1
Keinonen, J.2
Ghaly, M.3
Averback, R.S.4
-
25
-
-
2842549240
-
Ion-beam Processing of Silicon at keV Energies: A Molecular-Dynamics Study
-
Caturla, M.J., delaRubia, T.D., Marques, L.A., Gilmer, G.H., "Ion-beam Processing of Silicon at keV Energies: A Molecular-Dynamics Study," Physical Review B, Vol. 54, 1996, pp. 16683-16695.
-
(1996)
Physical Review B
, vol.54
, pp. 16683-16695
-
-
Caturla, M.J.1
Delarubia, T.D.2
Marques, L.A.3
Gilmer, G.H.4
-
26
-
-
0033516058
-
Efficient Molecular Dynamics Scheme for the Calculation of Dopant Profiles Due to Ion Implantation
-
Vol. 57, 1998, pp. 7278-7287; An Efficient Molecular Dynamics Scheme for Predicting Dopant Implant Profiles in Semiconductors, Nuclear Instruments and Methods in Physics Research B
-
Beardmore, K.M. and Gronbech-Jensen, N., "Efficient Molecular Dynamics Scheme for the Calculation of Dopant Profiles Due to Ion Implantation," Physical Review E, Vol. 57, 1998, pp. 7278-7287; "An Efficient Molecular Dynamics Scheme for Predicting Dopant Implant Profiles in Semiconductors," Nuclear Instruments and Methods in Physics Research B, Vol. 153, 1999, pp. 391-397.
-
(1999)
Physical Review E
, vol.153
, pp. 391-397
-
-
Beardmore, K.M.1
Gronbech-Jensen, N.2
-
28
-
-
0017700760
-
A Correction Factor to the Interatomic Potential Screening Function for Use in Computer Simulations
-
O'Connor, D.J. and MacDonald, R.J., "A Correction Factor to the Interatomic Potential Screening Function for Use in Computer Simulations," Radiation Effects, Vol. 34, 1977, pp. 247-250.
-
(1977)
Radiation Effects
, vol.34
, pp. 247-250
-
-
O'Connor, D.J.1
Macdonald, R.J.2
-
29
-
-
84894374182
-
The Stopping and Range of Ions in Solids
-
(Pergamon Press), New York, 1985; Williams, R.S., in Low Energy Ion-Surface Interactions, ed. J.W. Rabalais, (Wiley), Chichester
-
Ziegler, J. F., Biersack, J. P. and Littmark, U., The Stopping and Range of Ions in Solids, (Pergamon Press), New York, 1985; Williams, R.S., "Quantitative Intensity Analysis of Low-energy Scattering andRecoiling from Crystal Surfaces," in Low Energy Ion-Surface Interactions, ed. J.W. Rabalais, (Wiley), Chichester, 1994.
-
(1994)
Quantitative Intensity Analysis of Low-energy Scattering AndRecoiling From Crystal Surfaces
-
-
Ziegler, J.F.1
Biersack, J.P.2
Littmark, U.3
-
30
-
-
0031244707
-
Repulsive Interatomic Potentials Calculated Using Hartree- Fock and Density-Functional Theory Methods
-
Norlund, K., Runeberg, N., Sundholm, D., "Repulsive Interatomic Potentials Calculated Using Hartree- Fock and Density-Functional Theory Methods," Nuclear Instruments and Methods in Physics Research B, Vol. 132, 1997, pp. 45-54.
-
(1997)
Nuclear Instruments and Methods In Physics Research B
, vol.132
, pp. 45-54
-
-
Norlund, K.1
Runeberg, N.2
Sundholm, D.3
-
31
-
-
0026898592
-
Monte Carlo Simulation of Boron Implantation into Single-Crystal Silicon
-
Klein, K.M., Park, C. and Tasch, A.F., "Monte Carlo Simulation of Boron Implantation into Single-Crystal Silicon," IEEE Transactions on Electronic Devices, Vol. 39, 1992, pp. 1614-1621.
-
(1992)
IEEE Transactions On Electronic Devices
, vol.39
, pp. 1614-1621
-
-
Klein, K.M.1
Park, C.2
Tasch, A.F.3
-
32
-
-
84894380429
-
-
SRIM webpage
-
SRIM webpage http://www.research.ibm.com/ionbeams/SRIM/SRIMNOTE.HTM.
-
-
-
-
33
-
-
0028400834
-
keV Particle Bombardment of Solids: Molecular Dynamics Simulations and Beyond
-
Bernardo, D. N., Bhatia, R. and Garrison, B. J., "keV Particle Bombardment of Solids: Molecular Dynamics Simulations and Beyond," Computers in Physics Communications, Vol. 80, 1994, pp. 259-273.
-
(1994)
Computers In Physics Communications
, vol.80
, pp. 259-273
-
-
Bernardo, D.N.1
Bhatia, R.2
Garrison, B.J.3
-
34
-
-
0003837479
-
Energy Dependent Studies of Anisotropic Atomic Sputtering of Nickel {111}
-
Wucher, A., Watgen, M., Moessner, C., Oechsner, H. and Garrison, B. J.,"Energy Dependent Studies of Anisotropic Atomic Sputtering of Nickel {111}," Nuclear Instruments and Methods in Physics Research B, Vol. 67, 1992, pp. 531-535.
-
(1992)
Nuclear Instruments and Methods In Physics Research B
, vol.67
, pp. 531-535
-
-
Wucher, A.1
Watgen, M.2
Moessner, C.3
Oechsner, H.4
Garrison, B.J.5
-
35
-
-
0009577128
-
Internal and Translational Energy of Sputtered Silver Dimers: A Molecular Dynamics Study
-
Wucher, A., Garrison, B.J., "Internal and Translational Energy of Sputtered Silver Dimers: A Molecular Dynamics Study," Nuclear Instruments and Methods in Physics Research B, Vol. 67, 1992, pp. 518-522.
-
(1992)
Nuclear Instruments and Methods In Physics Research B
, vol.67
, pp. 518-522
-
-
Wucher, A.1
Garrison, B.J.2
-
36
-
-
0026641908
-
Sputtering of Silver Dimers: A Molecular Dynamics Calculation Using a Many-Body Embedded-Atom Potential
-
Wucher, A., Garrison, B.J., "Sputtering of Silver Dimers: A Molecular Dynamics Calculation Using a Many-Body Embedded-Atom Potential," Surface Science, Vol. 260, 1992, pp. 257-266.
-
(1992)
Surface Science
, vol.260
, pp. 257-266
-
-
Wucher, A.1
Garrison, B.J.2
-
37
-
-
0001407754
-
Cluster Formation in Sputtering: A Molecular Dynamics Study Using the MD/MC-Corrected Effective Medium Potential
-
Wucher, A., Garrison, B.J., "Cluster Formation in Sputtering: A Molecular Dynamics Study Using the MD/MC-Corrected Effective Medium Potential," Journal of Chemical Physics, Vol. 105, 1996, pp. 59996007.
-
(1996)
Journal of Chemical Physics
, vol.105
, pp. 59996007
-
-
Wucher, A.1
Garrison, B.J.2
-
38
-
-
0000640886
-
Mechanistic Study of Atomic Desorption Resulting From keV-Ion Bombardment of fee {001} Single-Crystal Metals
-
Rosencrance, S.W., Burnham, J.S., Sanders, D.E., He, C., Garrison, B.J., Winograd, N., Postawa, Z., DePristo, A.E., "Mechanistic Study of Atomic Desorption Resulting From keV-Ion Bombardment of fee {001} Single-Crystal Metals," Physical Review B, Vol. 52, 1995, pp. 6006-6014.
-
(1995)
Physical Review B
, vol.52
, pp. 6006-6014
-
-
Rosencrance, S.W.1
Burnham, J.S.2
Sanders, D.E.3
He, C.4
Garrison, B.J.5
Winograd, N.6
Postawa, Z.7
Depristo, A.E.8
-
39
-
-
0039613211
-
Corrected Effective Medium Method. V. Simplifications for Molecular Dynamics and Monte Carlo Simulations
-
Stave, M.S., Sanders, D.E., Raeker, T.J. and DePristo, A.E., "Corrected Effective Medium Method. V. Simplifications for Molecular Dynamics and Monte Carlo Simulations," Journal of Chemical Physics, Vol. 93, 1990, pp. 4413-4426.
-
(1990)
Journal of Chemical Physics
, vol.93
, pp. 4413-4426
-
-
Stave, M.S.1
Sanders, D.E.2
Raeker, T.J.3
Depristo, A.E.4
-
40
-
-
0032162789
-
Experiment and Simulation of Cluster Emission From 5keV Ar->Cu
-
Colla, Th.J., Urbassek, H.M., Wucher, A., Staudt, C., Heinrich, R., Garrison, B.J., Dandachi, C., Betz, G., "Experiment and Simulation of Cluster Emission From 5keV Ar->Cu," Nuclear Instruments and Methods in Physics Research B, Vol 143, 1998, pp. 284-297.
-
(1998)
Nuclear Instruments and Methods In Physics Research B
, vol.143
, pp. 284-297
-
-
Colla, T.J.1
Urbassek, H.M.2
Wucher, A.3
Staudt, C.4
Heinrich, R.5
Garrison, B.J.6
Dandachi, C.7
Betz, G.8
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