Wafer-scale micro-optics fabrication

Advanced Optical Technologies

Volumn 1, Issue 3, 2012, Pages 135-150

  Voelkel, Reinhard ^a  

^a SUSS MicroOpticsSA   (Switzerland)

Author keywords

Beam shaping; Confocal microscope; Diffractive optical elements; Fiber coupling; Microlens array; Microoptics; Wafer level optics; Wafer level packaging

Indexed keywords

EID: 84893988968     PISSN: 21928576     EISSN: 21928584     Source Type: Journal    
DOI: 10.1515/aot-2012-0013     Document Type: Review

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