Diffractive beamshaping elements at the fabrication limit

Optical Engineering

Volumn 35, Issue 10, 1996, Pages 2779-2787

  Singer, Wolfgang ^a   Herzig, Hans Peter ^b   Kuittinen, Markku ^c   Piper, Eckhard ^d   Wangler, Johannes ^d  

^a UNIVERSITY OF STUTTGART   (Germany)

^b Bâtiment G   (Switzerland)

^c UNIVERSITY OF EASTERN FINLAND   (Finland)

^d CARL ZEISS SMT AG   (Germany)

Author keywords

Arrays; Diffractive optical elements; Diffusors; Encoding; Lenses

Indexed keywords

EID: 0001549169     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600960     Document Type: Article

References (13)

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