Two step process for the fabrication of diffraction limited concave microlens arrays

Optics Express

Volumn 16, Issue 24, 2008, Pages 19541-19549

  Ruffieux, Patrick ^a   Scharf, Toralf ^a   Philipoussis, Irène ^a   Herzig, Hans Peter ^a   Voelkel, Reinhard ^b   Weible, Kenneth J ^b  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b SUSS MICROOPTICS SA   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROLENSES; MICROOPTICS; OPTICAL INSTRUMENT LENSES; PHOTOLITHOGRAPHY; PHOTORESISTS;

CONCAVE MICRO-LENSES; CONCAVE MICROLENS ARRAYS; CONCAVE SHAPE; DIFFRACTION LIMITED; NUMERICAL APERTURE; OPTICAL PERFORMANCE; TWO-STEP PROCESS;

DIFFRACTION;

EID: 56749178911     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.019541     Document Type: Article

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