Conductive amorphous hydrocarbon film for bio-sensor formed by low temperature neutral beam enhanced chemical vapor deposition

Carbon

Volumn 67, Issue , 2014, Pages 635-642

  Kikuchi, Yoshiyuki ^a,b   Wada, Akira ^a   Kurotori, Takuya ^b   Nakano, Masanori ^a   Inoue, Kumi Y ^a   Matsue, Tomokazu ^a   Nozawa, Toshihisa ^b   Samukawa, Seiji ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; AROMATIC HYDROCARBONS; CARBON; CHEMICAL VAPOR DEPOSITION; DEPOSITION; DOPING (ADDITIVES); ELECTROCHEMICAL ELECTRODES; ELECTRODES; HYDROCARBONS; MOLECULAR STRUCTURE; PARTICLE BEAMS; POLYCYCLIC AROMATIC HYDROCARBONS; SILICON; TEMPERATURE; TOLUENE;

AMORPHOUS HYDROCARBONS; CONDUCTIVE CARBON; CONJUGATED CHAIN; FILM STRUCTURE; HIGH TEMPERATURE; LOW TEMPERATURES; NITROGEN-DOPED; WORKING CURRENT;

VAPOR DEPOSITION;

EID: 84892802207     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2013.10.037     Document Type: Article

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