Characterization of nanostructured TiZrN thin films deposited by reactive DC magnetron co-sputtering

Procedia Engineering

Volumn 32, Issue , 2012, Pages 571-576

  Chinsakolthanakorn, S ^a   Buranawong, A ^b,c   Witit Anun, N ^b,c   Chaiyakun, S ^b,c   Limsuwan, P ^a,c  

^a KING MONGKUT'S UNIVERSITY OF TECHNOLOGY THONBURI   (Thailand)

^b BURAPHA UNIVERSITY   (Thailand)

^c Thailand Ministry of Science and Technology   (Thailand)

Author keywords

Reactive DC Magnetron Co sputtering; Titanium Sputtering Current; TiZrN

Indexed keywords

EID: 84892583573     PISSN: 18777058     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2012.01.1310     Document Type: Conference Paper

References (14)

1. Lin YW, Huang JH, Yu GP. Effect of nitrogen flow rate on properties of nanostructured TiZrN thin films produced by radio frequency magnetron sputtering. Thin Solid Films 2010;518:7308-11
2. Hogmark S, Jacobson S, Larsson S. Design and evaluation of tribological coatings. Wear 2000;246:20-33
3. Liu CP, Yang HG. Systematic study of the evolution of texture and electrical properties of ZrNx thin films by reactive DC magnetron sputtering. Thin Solid Films 2003;444:111-9
4. Shum PW, Tam WC, Li KY, Zhou ZF, Shen YG. Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalance magnetron sputtering. Wear 2004;257:1030-40
5. Singh K, Limaye PK, Soni NL, Grover, AK, Agrawal RG, Suri, AK. Wear studies of (Ti-Al)N coatings deposited by reactive magnetron sputtering. Wear 2005;258:1813-24
6. Chung KH, Liu GT, Duh JG, Wang JH. Biocompatibility of a titanium-aluminum nitride film coating on a dental alloy. Surf Coat Technol 2004;188-189:745-9
7. Lugscheider E, Knotek O, Barimani C, Leyendecker T, Lemmer O, Wenke R. PVD hard coated reamers in lubricant-free cutting. Surf Coat Technol 1999;112:146-151
8. Wang DY, Chang CL, Hsu CH, Lin HN. Synthesis of (Ti,Zr)N hard coatings by unbalanced magnetron sputtering. Surf Coat Technol 2000;130:64-8
9. Ramana JV, Kumar S, David C, Saju VS. Structure, composition and microhardness of (Ti,Zr)N and (Ti,Al)N coatings prepared by DC magnetron sputtering. Mater Lett 2004;58:2553-58
10. Niu EW, Li L, Lv GH, Chen H, Feng WR, Yang SZ. Characterization of Ti-Zr-N films deposited by cathodic vacuum arc with different substrate bias. Appl Surf Sci 2008;254:3909-14
11. Uglov VV, Anishchik, VM, Zlotski SV, Abadias G. The phase composition and stress development in ternary Ti-Zr-N coatings grown by vacuum arc with combining of plasma flow. Surf Coat Technol 2006;200:6389-94
12. Wang DY, Chang CL, Hsu CH, Lin HN. Synthesis of (Ti,Zr)N hard coatings by unbalanced magnetron sputtering. Surf Coat Technol 2000;130:64-8
13. Takeyama MB, Itoi T, Aoyagi E, Noya A. Diffusion barrier properties of nano-crystalline TiZrN films in Cu/Si contact systems. Appl Surf Sci 2003;216:181-6
14. Thornton JA. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings. J Vac Sci Technol 1974;11:666-70.