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Volumn 258, Issue 11-12, 2005, Pages 1813-1824

Wear studies of (Ti-Al)N coatings deposited by reactive magnetron sputtering

Author keywords

(Ti Al)N; Coating; Friction; Magnetron sputtering; Microhardness; Wear

Indexed keywords

COATINGS; ENERGY DISPERSIVE SPECTROSCOPY; HARDNESS; MAGNETRON SPUTTERING; NITROGEN; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

EID: 17544375368     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2004.12.023     Document Type: Article
Times cited : (74)

References (32)
  • 1
    • 0000129717 scopus 로고
    • High rate reactively sputtered TiN coatings on high speed steel drills
    • W.D. Sproul, and R. Rothstein High rate reactively sputtered TiN coatings on high speed steel drills Thin Solid Films 126 1985 257 263
    • (1985) Thin Solid Films , vol.126 , pp. 257-263
    • Sproul, W.D.1    Rothstein, R.2
  • 2
    • 0023453185 scopus 로고
    • Comparison of cutting performance of ion-plated NbN, ZrN, TiN and (Ti-Al)N coatings
    • M. Molarius, A. Korhonen, E. Harju, and R. Lappalainen Comparison of cutting performance of ion-plated NbN, ZrN, TiN and (Ti-Al)N coatings Surf. Coat. Technol. 33 1987 117 132
    • (1987) Surf. Coat. Technol. , vol.33 , pp. 117-132
    • Molarius, M.1    Korhonen, A.2    Harju, E.3    Lappalainen, R.4
  • 3
    • 0022451398 scopus 로고
    • On structure and properties of sputtered Ti and Al based hard compound films
    • W.-D. Münz On structure and properties of sputtered Ti and Al based hard compound films J. Vac. Sci. Technol. A4 1986 2695 2700
    • (1986) J. Vac. Sci. Technol. , vol.4 , pp. 2695-2700
    • Münz, W.-D.1
  • 4
    • 25544459890 scopus 로고
    • Titanium aluminum nitride films: A new alternative to TiN coatings
    • W.-D. Münz Titanium aluminum nitride films: a new alternative to TiN coatings J. Vac. Sci. Technol. A4 1986 2717 2725
    • (1986) J. Vac. Sci. Technol. , vol.4 , pp. 2717-2725
    • Münz, W.-D.1
  • 5
    • 0031098214 scopus 로고    scopus 로고
    • Dry cutting performance of HSS twist drills coated with improved TiAlN
    • I.J. Smith, D. Gillibrand, J.S. Brooks, and W.-D. Munz Dry cutting performance of HSS twist drills coated with improved TiAlN Surf. Coat. Technol. 90 1997 164 171
    • (1997) Surf. Coat. Technol. , vol.90 , pp. 164-171
    • Smith, I.J.1    Gillibrand, D.2    Brooks, J.S.3    Munz, W.-D.4
  • 7
    • 0002173308 scopus 로고    scopus 로고
    • Thermal stability of nitride thin films
    • L. Hultman Thermal stability of nitride thin films Vacuum 57 2000 1 30
    • (2000) Vacuum , vol.57 , pp. 1-30
    • Hultman, L.1
  • 8
    • 0032629206 scopus 로고    scopus 로고
    • Deposition of high quality (Ti, Al)N hard coatings by vacuum arc evaporation process
    • D.-Y. Wang, Y.-W. Li, C.-L. Chang, and W.-Y. Ho Deposition of high quality (Ti, Al)N hard coatings by vacuum arc evaporation process Surf. Coat. Technol. 114 1999 109 113
    • (1999) Surf. Coat. Technol. , vol.114 , pp. 109-113
    • Wang, D.-Y.1    Li, Y.-W.2    Chang, C.-L.3    Ho, W.-Y.4
  • 9
    • 0023434695 scopus 로고
    • On the structure of (Ti, Al)N-PVD coatings
    • O. Knotek, and T. Leyendecker On the structure of (Ti, Al)N-PVD coatings J. Solid State Chem. 70 1987 318 322
    • (1987) J. Solid State Chem. , vol.70 , pp. 318-322
    • Knotek, O.1    Leyendecker, T.2
  • 10
    • 17544366469 scopus 로고    scopus 로고
    • Development and biocompatibility of hard Ti-based coatings using plasma immersion ion implantation-assisted deposition
    • in press, online 8 October
    • S. Mukherjee, M.F. Maitz, M.T. Pham, E. Ritcher, F. Prokert, W. Moeller, Development and biocompatibility of hard Ti-based coatings using plasma immersion ion implantation-assisted deposition, Surf. Coat. Technol. in press, online 8 October 2004.
    • (2004) Surf. Coat. Technol.
    • Mukherjee, S.1    Maitz, M.F.2    Pham, M.T.3    Ritcher, E.4    Prokert, F.5    Moeller, W.6
  • 11
    • 0036147110 scopus 로고    scopus 로고
    • Mechanical properties of TiN thin film coatings on 304 SS substrates
    • W.-J. Chou, G.-P. Yu, and J.-H. Huang Mechanical properties of TiN thin film coatings on 304 SS substrates Surf. Coat. Technol. 149 2002 7 13
    • (2002) Surf. Coat. Technol. , vol.149 , pp. 7-13
    • Chou, W.-J.1    Yu, G.-P.2    Huang, J.-H.3
  • 12
    • 2442521153 scopus 로고    scopus 로고
    • Surface modification of TiN films by nitrogen ion beam irradiation in ethylene gas atmosphere
    • I. Nakamura, D. Matsui, M. Sasaki, I. Takano, and Y. Sawada Surface modification of TiN films by nitrogen ion beam irradiation in ethylene gas atmosphere Vacuum 74 2004 659 663
    • (2004) Vacuum , vol.74 , pp. 659-663
    • Nakamura, I.1    Matsui, D.2    Sasaki, M.3    Takano, I.4    Sawada, Y.5
  • 14
    • 0032674888 scopus 로고    scopus 로고
    • (Ti,Cr)N and Ti/TiN PVD coatings on 304 stainless steel substrates: Wear-corrosion behaviour
    • S. Rossi, L. Fedrizzi, M. Leoni, P. Scardi, and Y. Massiani (Ti,Cr)N and Ti/TiN PVD coatings on 304 stainless steel substrates: wear-corrosion behaviour Thin Solid Films 350 1-2 1999 161 167
    • (1999) Thin Solid Films , vol.350 , Issue.1-2 , pp. 161-167
    • Rossi, S.1    Fedrizzi, L.2    Leoni, M.3    Scardi, P.4    Massiani, Y.5
  • 15
    • 0023136972 scopus 로고
    • Industrial deposition of binary, ternary and quarternary nitrides of Ti, Zr and Al
    • O. Knotek, W.D. Münz, and T. Leyendecker Industrial deposition of binary, ternary and quarternary nitrides of Ti, Zr and Al J. Vac. Sci. Technol. A5 4 1987 2173 2183
    • (1987) J. Vac. Sci. Technol. , vol.5 , Issue.4 , pp. 2173-2183
    • Knotek, O.1    Münz, W.D.2    Leyendecker, T.3
  • 16
    • 0025792680 scopus 로고
    • Phase formation and characterization of hard coatings in the Ti-Al-N system prepared by the cathodic arc ion plating method
    • T. Ikeda, and H. Satoh Phase formation and characterization of hard coatings in the Ti-Al-N system prepared by the cathodic arc ion plating method Thin solid Films 195 1991 99 110
    • (1991) Thin Solid Films , vol.195 , pp. 99-110
    • Ikeda, T.1    Satoh, H.2
  • 17
    • 0026360651 scopus 로고
    • Physically vapor deposited coatings on tools: Performance and wear phenomena
    • W. Konig, R. Fritch, and D. Kammermeier Physically vapor deposited coatings on tools: performance and wear phenomena Surf. Coat. Technol. 49 1991 316 324
    • (1991) Surf. Coat. Technol. , vol.49 , pp. 316-324
    • Konig, W.1    Fritch, R.2    Kammermeier, D.3
  • 18
    • 0026004336 scopus 로고
    • The development of the PVD coating TiAlN as a commercial coating for cutting tools
    • T. Leyendecker, O. Lemmer, S. Esser, and J. Ebberink The development of the PVD coating TiAlN as a commercial coating for cutting tools Surf. Coat. Technol. 48 1991 175 178
    • (1991) Surf. Coat. Technol. , vol.48 , pp. 175-178
    • Leyendecker, T.1    Lemmer, O.2    Esser, S.3    Ebberink, J.4
  • 19
    • 0031250995 scopus 로고    scopus 로고
    • 4 ceramic
    • 4 ceramic J. Mater. Sci. 32 1997 5483 5490
    • (1997) J. Mater. Sci. , vol.32 , pp. 5483-5490
    • Ukyo, Y.1
  • 21
    • 0027589851 scopus 로고
    • High-temperature oxidation of ion-plated TiN and TiAlN films
    • H. Ichmura, and A. Kawana High-temperature oxidation of ion-plated TiN and TiAlN films J. Mater. Res. 8 1993 1093 1100
    • (1993) J. Mater. Res. , vol.8 , pp. 1093-1100
    • Ichmura, H.1    Kawana, A.2
  • 22
    • 21844482911 scopus 로고
    • x)N coatings made by plasma enhanced chemical vapor deposition
    • x)N coatings made by plasma enhanced chemical vapor deposition J. Vac. Sci. Technol. A13 1995 2030 2034
    • (1995) J. Vac. Sci. Technol. , vol.13 , pp. 2030-2034
    • Lee, S.H.1    Lee, J.J.2
  • 23
    • 0031257966 scopus 로고    scopus 로고
    • x)N coatings made by plasma enhanced chemical vapour deposition
    • x)N coatings made by plasma enhanced chemical vapour deposition J. Mater. Sci. Lett. 16 1997 1597 1599
    • (1997) J. Mater. Sci. Lett. , vol.16 , pp. 1597-1599
    • Kim, B.J.1    Lee, S.H.2    Lee, J.J.3
  • 25
    • 0032505844 scopus 로고    scopus 로고
    • Corrosion tests of PVD coatings with die lubricant used for Al high-pressure die-casting dies
    • J.E. Lugscheider, C. Barimani, S. Guerreiro, and K. Bobzin Corrosion tests of PVD coatings with die lubricant used for Al high-pressure die-casting dies Surf. Coat. Technol. 108-109 1998 408 412
    • (1998) Surf. Coat. Technol. , vol.108-109 , pp. 408-412
    • Lugscheider, J.E.1    Barimani, C.2    Guerreiro, S.3    Bobzin, K.4
  • 26
    • 0035446438 scopus 로고    scopus 로고
    • Effect of nitrogen partial pressure on electrochemical evaluation of (Ti-Al)N coatings
    • K. Singh, A.K. Grover, M.K. Totlani, and A.K. Suri Effect of nitrogen partial pressure on electrochemical evaluation of (Ti-Al)N coatings Trans IMF 79 5 2001 190 194
    • (2001) Trans IMF , vol.79 , Issue.5 , pp. 190-194
    • Singh, K.1    Grover, A.K.2    Totlani, M.K.3    Suri, A.K.4
  • 27
  • 28
    • 0029530265 scopus 로고
    • Structure and composition of (Ti, Al)N films prepared by r.f. planar magnetron sputtering using a composite target
    • S. Inoue, H. Uchida, A. Hikoi, K. Koterazawa, and R.P. Howson Structure and composition of (Ti, Al)N films prepared by r.f. planar magnetron sputtering using a composite target Thin Solid Films 271 1995 15 18
    • (1995) Thin Solid Films , vol.271 , pp. 15-18
    • Inoue, S.1    Uchida, H.2    Hikoi, A.3    Koterazawa, K.4    Howson, R.P.5
  • 30
    • 0029254828 scopus 로고
    • The effects of nitrogen flow on reactively sputtered Ti-Al-N films
    • Bor-Yuan Shew, and Jow-Lay Huang The effects of nitrogen flow on reactively sputtered Ti-Al-N films Surf. Coat. Technol. 71 1995 30 36
    • (1995) Surf. Coat. Technol. , vol.71 , pp. 30-36
    • Bor-Yuan, S.1    Jow-Lay, H.2
  • 31
    • 0033534989 scopus 로고    scopus 로고
    • Phase transition and properties of Ti-Al-N thin films prepared by r.f.-plasma assisted magnetron sputtering
    • M. Zhou, Y. Makino, M. Nose, and K. Nagi Phase transition and properties of Ti-Al-N thin films prepared by r.f.-plasma assisted magnetron sputtering Thin solid Films 339 1999 203 208
    • (1999) Thin Solid Films , vol.339 , pp. 203-208
    • Zhou, M.1    Makino, Y.2    Nose, M.3    Nagi, K.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.