Impact of the interplay between nonstoichiometry and kinetic energy of the plume species on the growth mode of SrTiO3 thin films

Journal of Physics D: Applied Physics

Volumn 47, Issue 3, 2014, Pages

  Xu, C ^a   Wicklein, S ^a   Sambri, A ^b   Amoruso, S ^b   Moors, M ^a   Dittmann, R ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b UNIVERSITY OF NAPLES FEDERICO II   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION REGIMES; DIAGNOSTICS TECHNIQUES; DIFFUSION PROCESS; NONSTOICHIOMETRIC CONDITIONS; NUCLEATION AND GROWTH; PROCESS PARAMETERS; THREE-DIMENSIONAL GROWTH; TWO-DIMENSIONAL GROWTH;

ADATOMS; ATOMIC FORCE MICROSCOPY; DIFFUSION; EPITAXIAL GROWTH; KINETICS; PULSED LASER DEPOSITION; STRONTIUM TITANATES; THIN FILMS;

KINETIC ENERGY;

EID: 84891101099     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/47/3/034009     Document Type: Article

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