Directed self-assembly of laterally confined lamellae-forming diblock copolymers: Polydispersity and substrate interaction effects

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8323, Issue , 2012, Pages

  Takahashi, Hassei ^a,b   Laachi, Nabil ^a   Hur, Su Mi ^a,b   Weinheimer, Corey J ^c   Shykind, David ^c   Fredrickson, Glenn H ^a,b  

^a University of California   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

defects; directed self assembly; polydispersity; preferential substrate; self consistent field theory

Indexed keywords

BLOCK COPOLYMERS; LITHOGRAPHY; MEAN FIELD THEORY; MOLECULAR ORBITALS; POLYDISPERSITY; SELF ASSEMBLY; VOLCANIC ROCKS;

BLOCK COPOLYMER LITHOGRAPHY; DIRECTED SELF-ASSEMBLY; DISCLINATION DEFECTS; POLYMER-SUBSTRATE INTERACTIONS; SELF CONSISTENT FIELD THEORY; SUBSTRATE CONDITIONS; SUBSTRATE INTERACTION; THEORETICAL METHODS;

DEFECTS;

EID: 84875307118     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.916578     Document Type: Conference Paper

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