메뉴 건너뛰기




Volumn 21, Issue 23, 2013, Pages 28189-28197

Aberration compensation in aplanatic solid immersion lens microscopy

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL CONSTANTS; OPTICS;

EID: 84888258580     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.028189     Document Type: Article
Times cited : (16)

References (28)
  • 1
    • 0001735451 scopus 로고
    • Solid immersion microscope
    • S. M. Mansfield and G. S. Kino, "Solid Immersion Microscope," Appl. Phys. Lett. 57(24), 2615-2616 (1990).
    • (1990) Appl. Phys. Lett , vol.57 , Issue.24 , pp. 2615-2616
    • Mansfield, S.M.1    Kino, G.S.2
  • 2
    • 0000832375 scopus 로고    scopus 로고
    • Near-field scanning solid immersion microscope
    • L. P. Ghislain and V. B. Elings, "Near-field scanning solid immersion microscope," Appl. Phys. Lett. 72(22), 2779-2781 (1998).
    • (1998) Appl. Phys. Lett , vol.72 , Issue.22 , pp. 2779-2781
    • Ghislain, L.P.1    Elings, V.B.2
  • 4
    • 0000431132 scopus 로고    scopus 로고
    • Enhanced reflectivity contrast in confocal solid immersion lens microscopy
    • K. Karrai, X. Lorenz, and L. Novotny, "Enhanced reflectivity contrast in confocal solid immersion lens microscopy," Appl. Phys. Lett. 77(21), 3459-3461 (2000).
    • (2000) Appl. Phys. Lett , vol.77 , Issue.21 , pp. 3459-3461
    • Karrai, K.1    Lorenz, X.2    Novotny, L.3
  • 5
    • 34548496328 scopus 로고    scopus 로고
    • Imaging performance of widefield solid immersion lens microscopy
    • J. Zhang, C. W. See, and M. G. Somekh, "Imaging performance of widefield solid immersion lens microscopy," Appl. Opt. 46(20), 4202-4208 (2007).
    • (2007) Appl. Opt , vol.46 , Issue.20 , pp. 4202-4208
    • Zhang, J.1    See, C.W.2    Somekh, M.G.3
  • 6
    • 0035948103 scopus 로고    scopus 로고
    • High spatial resolution subsurface microscopy
    • S. B. Ippolito, B. B. Goldberg, and M. S. Ünlü, "High spatial resolution subsurface microscopy," Appl. Phys. Lett. 78(26), 4071-4073 (2001).
    • (2001) Appl. Phys. Lett , vol.78 , Issue.26 , pp. 4071-4073
    • Ippolito, S.B.1    Goldberg, B.B.2    Ünlü, M.S.3
  • 8
    • 12344325666 scopus 로고    scopus 로고
    • Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm
    • E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, and D. T. Reid, "Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm," Opt. Lett. 30(1), 26-28 (2005).
    • (2005) Opt. Lett , vol.30 , Issue.1 , pp. 26-28
    • Ramsay, E.1    Pleynet, N.2    Xiao, D.3    Warburton, R.J.4    Reid, D.T.5
  • 9
    • 20444498219 scopus 로고    scopus 로고
    • Theoretical analysis of numerical aperture increasing lens microscopy
    • S. B. Ippolito, B. B. Goldberg, and M. S. Ünlü, "Theoretical analysis of numerical aperture increasing lens microscopy," J. Appl. Phys. 97(5), 053105 (2005).
    • (2005) J. Appl. Phys , vol.97 , Issue.5 , pp. 053105
    • Ippolito, S.B.1    Goldberg, B.B.2    Ünlü, M.S.3
  • 11
    • 75749129432 scopus 로고    scopus 로고
    • Subsurface microscopy of interconnect layers of an integrated circuit
    • F. H. Köklü and M. S. Unlü, "Subsurface microscopy of interconnect layers of an integrated circuit," Opt. Lett. 35(2), 184-186 (2010).
    • (2010) Opt. Lett , vol.35 , Issue.2 , pp. 184-186
    • Köklü, F.H.1    Unlü, M.S.2
  • 12
    • 0038239361 scopus 로고    scopus 로고
    • Focusing of electromagnetic waves through a dielectric interface by lenses of finite fresnel number
    • P. Török, "Focusing of electromagnetic waves through a dielectric interface by lenses of finite Fresnel number," J. Opt. Soc. Am. A 15(12), 3009-3015 (1998).
    • (1998) J. Opt. Soc. Am. A , vol.15 , Issue.12 , pp. 3009-3015
    • Török, P.1
  • 13
    • 56749170911 scopus 로고    scopus 로고
    • Geometrical analysis of third-order aberrations for a solid immersion lens
    • M. Lang, E. Aspnes, and T. D. Milster, "Geometrical analysis of third-order aberrations for a solid immersion lens," Opt. Express 16(24), 20008-20028 (2008).
    • (2008) Opt. Express , vol.16 , Issue.24 , pp. 20008-20028
    • Lang, M.1    Aspnes, E.2    Milster, T.D.3
  • 14
    • 58649122463 scopus 로고    scopus 로고
    • High aperture focusing through a spherical interface: Application to refractive solid immersion lens (rsil) for subsurface imaging
    • S. H. Goh and C. J. R. Sheppard, "High aperture focusing through a spherical interface: Application to refractive solid immersion lens (RSIL) for subsurface imaging," Opt. Commun. 282(5), 1036-1041 (2009).
    • (2009) Opt. Commun , vol.282 , Issue.5 , pp. 1036-1041
    • Goh, S.H.1    Sheppard, C.J.R.2
  • 15
    • 59349085169 scopus 로고    scopus 로고
    • Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques
    • S. H. Goh, C. J. R. Sheppard, A. C. T. Quah, C. M. Chua, L. S. Koh, and J. C. H. Phang, "Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques," Rev. Sci. Instrum. 80(1), 013703 (2009).
    • (2009) Rev. Sci. Instrum , vol.80 , Issue.1 , pp. 013703
    • Goh, S.H.1    Sheppard, C.J.R.2    Quah, A.C.T.3    Chua, C.M.4    Koh, L.S.5    Phang, J.C.H.6
  • 17
    • 84869801064 scopus 로고    scopus 로고
    • Complete modeling of subsurface microscopy system based on aplanatic solid immersion lens
    • R. Chen, K. Agarwal, Y. Zhong, C. J. R. Sheppard, J. C. H. Phang, and X. D. Chen, "Complete modeling of subsurface microscopy system based on aplanatic solid immersion lens," J. Opt. Soc. Am. A 29(11), 2350-2359 (2012).
    • (2012) J. Opt. Soc. Am. A , vol.29 , Issue.11 , pp. 2350-2359
    • Chen, R.1    Agarwal, K.2    Zhong, Y.3    Sheppard, C.J.R.4    Phang, J.C.H.5    Chen, X.D.6
  • 18
    • 84879354495 scopus 로고    scopus 로고
    • A complete and computationally efficient numerical model of aplanatic solid immersion lens scanning microscope
    • R. Chen, K. Agarwal, C. J. R. Sheppard, J. C. H. Phang, and X. D. Chen, "A complete and computationally efficient numerical model of aplanatic solid immersion lens scanning microscope," Opt. Express 21(12), 14316- 14330 (2013).
    • (2013) Opt. Express , vol.21 , Issue.12 , pp. 14316-14330
    • Chen, R.1    Agarwal, K.2    Sheppard, C.J.R.3    Phang, J.C.H.4    Chen, X.D.5
  • 19
    • 84879989213 scopus 로고    scopus 로고
    • Rigorous analytical modeling of high-aperture focusing through a spherical interface
    • T. X. Hoang, X. D. Chen, and C. J. R. Sheppard, "Rigorous analytical modeling of high-aperture focusing through a spherical interface," J. Opt. Soc. Am. A 30(7), 1426-1440 (2013).
    • (2013) J. Opt. Soc. Am. A , vol.30 , Issue.7 , pp. 1426-1440
    • Hoang, T.X.1    Chen, X.D.2    Sheppard, C.J.R.3
  • 20
    • 75149192279 scopus 로고    scopus 로고
    • High-resolution wide-field microscopy with adaptive optics for spherical aberration correction and motionless focusing
    • P. Kner, J. W. Sedat, D. A. Agard, and Z. Kam, "High-resolution wide-field microscopy with adaptive optics for spherical aberration correction and motionless focusing," J. Microsc. 237(2), 136-147 (2010).
    • (2010) J. Microsc , vol.237 , Issue.2 , pp. 136-147
    • Kner, P.1    Sedat, J.W.2    Agard, D.A.3    Kam, Z.4
  • 21
    • 33745379963 scopus 로고    scopus 로고
    • Spherical aberration correction system using an adaptive optics deformable mirror
    • M. Schwertner, M. Booth, T. Tanaka, T. Wilson, and S. Kawata, "Spherical aberration correction system using an adaptive optics deformable mirror," Opt. Commun. 263(2), 147-151 (2006).
    • (2006) Opt. Commun , vol.263 , Issue.2 , pp. 147-151
    • Schwertner, M.1    Booth, M.2    Tanaka, T.3    Wilson, T.4    Kawata, S.5
  • 22
    • 77950192875 scopus 로고    scopus 로고
    • Characterization of deformable mirrors for spherical aberration correction in optical sectioning microscopy
    • M. Shaw, S. Hall, S. Knox, R. Stevens, and C. Paterson, "Characterization of deformable mirrors for spherical aberration correction in optical sectioning microscopy," Opt. Express 18(7), 6900-6913 (2010).
    • (2010) Opt. Express , vol.18 , Issue.7 , pp. 6900-6913
    • Shaw, M.1    Hall, S.2    Knox, S.3    Stevens, R.4    Paterson, C.5
  • 23
    • 37549062280 scopus 로고    scopus 로고
    • Aberration-free optical refocusing in high numerical aperture microscopy
    • E. J. Botcherby, R. Juskaitis, M. J. Booth, and T. Wilson, "Aberration-free optical refocusing in high numerical aperture microscopy," Opt. Lett. 32(14), 2007-2009 (2007).
    • (2007) Opt. Lett , vol.32 , Issue.14 , pp. 2007-2009
    • Botcherby, E.J.1    Juskaitis, R.2    Booth, M.J.3    Wilson, T.4
  • 24
    • 38449100898 scopus 로고    scopus 로고
    • Adaptive optics in microscopy
    • M. J. Booth, "Adaptive optics in microscopy," Philos Trans A Math Phys Eng Sci 365(1861), 2829-2843 (2007).
    • (2007) Philos Trans A Math Phys Eng Sci , vol.365 , Issue.1861 , pp. 2829-2843
    • Booth, M.J.1
  • 26
    • 0011060250 scopus 로고
    • Basic wavefront aberration theory for optical metrology
    • Academic, Chap. 1
    • R. R. Shannon and J. C. Wyant, "Basic Wavefront Aberration Theory for Optical Metrology," in Applied Optics and Optical Engineering, Vol. 11 (Academic, 1992), Chap. 1.
    • (1992) Applied Optics and Optical Engineering , vol.11
    • Shannon, R.R.1    Wyant, J.C.2
  • 27
    • 0031766037 scopus 로고    scopus 로고
    • Aberration correction for confocal imaging in refractive-indexmismatched media
    • M. J. Booth, M. A. A. Neil, and T. Wilson, "Aberration correction for confocal imaging in refractive-indexmismatched media," J. Microsc. 192(2), 90-98 (1998).
    • (1998) J. Microsc , vol.192 , Issue.2 , pp. 90-98
    • Booth, M.J.1    Neil, M.A.A.2    Wilson, T.3
  • 28
    • 84855978038 scopus 로고    scopus 로고
    • Adaptive optics for biomedical microscopy
    • M. J. Booth, D. Débarre, and A. Jesacher, "Adaptive optics for biomedical microscopy," Opt. Photonics News 23(1), 22-29 (2012).
    • (2012) Opt. Photonics News , vol.23 , Issue.1 , pp. 22-29
    • Booth, M.J.1    Débarre, D.2    Jesacher, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.