Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques

Review of Scientific Instruments

Volumn 80, Issue 1, 2009, Pages

  Goh, S H ^a   Sheppard, C J R ^a   Quah, A C T ^a   Chua, C M ^b   Koh, L S ^b   Phang, J C H ^a,b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b SEMICAPS Corporation   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; FAILURE ANALYSIS; INTEGRATED CIRCUITS; LENSES; OPTICAL DATA STORAGE; OPTICAL INSTRUMENTS; QUALITY ASSURANCE; SAFETY FACTOR;

ADVANCED TECHNOLOGIES; CIRCUIT FAULTS; CONVENTIONAL LASERS; CRITICAL STEPS; DESIGN CONSIDERATIONS; DESIGN PARAMETERS; FAULT LOCALIZATIONS; FOCAL PLANES; LASER SPOT SIZES; LASER-INDUCED; LASER-SCANNING; NEW MATERIALS; NUMERICAL APERTURES; OPERATING CONDITIONS; SOLID IMMERSION LENS; SPATIAL RESOLUTIONS;

LASERS;

ARTICLE; LASER; METHODOLOGY; OPTICAL INSTRUMENTATION; REFRACTOMETRY; SENSITIVITY AND SPECIFICITY; THEORETICAL MODEL;

LASERS; LENSES; MODELS, THEORETICAL; REFRACTOMETRY; SENSITIVITY AND SPECIFICITY;

EID: 59349085169     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3070612     Document Type: Article

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