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Volumn 52, Issue 9-10, 2012, Pages 2120-2122

Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

Author keywords

[No Author keywords available]

Indexed keywords

MEMS DEFORMABLE MIRROR; SOLID IMMERSION LENS; SPHERICAL ABERRATION CORRECTION; SPHERICAL ABERRATIONS; SPOT INTENSITIES; SUBSTRATE THICKNESS;

EID: 84866730367     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2012.06.026     Document Type: Article
Times cited : (3)

References (10)
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    • Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits
    • B.B. Goldberg, A. Yurt, Y. Lu, E. Ramsay, F.H. Koklu, and J. Mertz Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits Microelectron Reliab 51 2011 1637 1639
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.