Subsurface microscopy of interconnect layers of an integrated circuit

Optics Letters

Volumn 35, Issue 2, 2010, Pages 184-186

  Köklü, F Hakan ^a   Ünlü, M Selim ^a  

^a Boston University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERCONNECT LAYERS; METAL STRUCTURES; SPATIAL RESOLUTION; VECTORIAL FIELDS; WIDE-FIELD;

INTEGRATED CIRCUITS;

EID: 75749129432     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.35.000184     Document Type: Article

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