In-situ plasma cleaning of samples to remove hydrocarbon and/or polydimethylsiloxane prior to ToF-SIMS analysis

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 6, 2013, Pages

  Smentkowski, Vincent S ^a   Moore, C A ^b  

^a GE GLOBAL RESEARCH   (United States)

^b XEI Scientific Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE ANALYSIS; ADSORBED LAYERS; PLASMA CLEANING; POLYDIMETHYLSILOXANE PDMS; REMOTE PLASMAS; SURFACE CONTAMINANTS; TIME-OF-FLIGHT SECONDARY ION MASS SPECTROSCOPY; TOF-SIMS ANALYSIS;

AIR CLEANERS; HYDROCARBONS; LABORATORIES; MICROCHANNELS; POLYMER BLENDS; SECONDARY ION MASS SPECTROMETRY; SURFACE ANALYSIS;

SILICONES;

EID: 84887916340     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4822516     Document Type: Article

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