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Thin Solid Films

Volumn 548, Issue , 2013, Pages 18-26

Applications of HIPIMS metal oxides

(5) Sittinger, V a Lenck, O a Vergohl M a Szyszka, B b Brauer G a

a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST (Germany)

b TECHNISCHE UNIVERSITÄT BERLIN (Germany)

Author keywords

AZO; HIPIMS; ITO; Reactive Sputtering; TCO; TiO2

Indexed keywords

AZO; HIPIMS; ITO; TCO; TIO;

ASPECT RATIO; MICROELECTRONICS; OPTICAL COATINGS; REACTIVE SPUTTERING;

HARD COATINGS;

EID: 84887431214 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.08.087 Document Type: Article

Times cited : (45)

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