Vapor-Phase Deposition of Oxides

Ceramics Science and Technology

Volumn , Issue , 2012, Pages 267-290

  Alff, Lambert ^a   Klein, Andreas ^a   Komissinskiy, Philipp ^a   Kurian, Jose ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Molecular beam epitaxy; Oxides; Pulsed laser deposition; Sputtering; Thin film technology

Indexed keywords

EID: 84886955644     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527631957.ch11     Document Type: Chapter

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