|
|
|
Volumn 442, Issue 1-2, 2003, Pages
|
|
Thin Solid Films
[No Author Info available]
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ATMOSPHERIC PRESSURE;
CRYSTALLIZATION;
DIAMOND LIKE CARBON FILMS;
ELECTRIC FIELDS;
FILM GROWTH;
GLASS;
GLOW DISCHARGES;
MAGNETIC FIELD EFFECTS;
MAGNETRON SPUTTERING;
OPTICAL COATINGS;
PARTIAL PRESSURE;
PARTIAL PRESSURE SENSORS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SOL-GELS;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
CLOSED DRIFTS;
EIREV;
FIELD EFFECTS;
GLASS COATINGS;
HIGH RATE DEPOSITION;
PEEL EFFECTS;
PLASMA STRUCTURES;
PROCESSING CHAMBERS;
PULSE MODE EFFECTS;
THIN FILMS;
|
|
EID: 0141859795
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: None Document Type: Conference Review |
|
Times cited : (4)
|
|
References (0)
|