TwinMag II: Improving an advanced sputtering tool

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 424-430

  Heister, U ^a   Krempel Hesse, J ^a   Szczyrbowski, J ^a   Teschner, G ^a   Bruch, J ^a   Brauer G ^a  

^a EVONIK INDUSTRIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347317467     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00297-9     Document Type: Article

References (7)

1. Schilling H, Szczyrbowski J, Ruske M, Lenz W. New layer system family for architectural glass. Boston: Society of Vacuum Coaters, 1998.
2. Beisenherz D, Bräuer G, Szczyrbowski J, Teschner G. Mass production of anti-reflex film system. Boston: Society of Vacuum Coaters, 1998.
3. Kukla R, Krug T, Ludwig R, Wilmes K. Vacuum 1990;41:1968.
4. Beiswenger S, Bräuer G, Dicken W, Szczyrbowski J. Surface and Coatings Technology 1993;60:624-8.
5. Scherer M, Schmitt J, Latz R, Schanz M. J Vac Sci Technol A 1992;10(4): 1772-6.
6. Rettich T, Wiedemuth P. New application of medium frequency sputtering for large area coating. Boston: Society of Vacuum Coaters, 1998.
7. 2-layers prepared by medium frequency and DC reactive sputtering. New Orleans: Society of Vacuum Coaters, 1997.